Laser Mask Pattern Formation with Counter Force

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Solution Overview

Problem

The existing methods for manufacturing mask sheets for OLED displays using laser processing face challenges in maintaining the initial position of the mask sheet during the pattern formation process, leading to potential pattern errors due to shifting of the final pattern position.

Innovation Solution

A method that involves determining a target scan line and a correction scan line for the laser beam, applying a counter force to the mask sheet, fixing it to a mask frame, scanning the laser along the correction scan line, and releasing the counter force to ensure accurate pattern formation by adjusting the scan line based on the error between the target and actual scan lines.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a counter force is applied to the mask sheet during laser processing, then the mask sheet position is maintained, but the process complexity increases due to additional force application and release steps

Engineering Contradiction:
Improvepattern position accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The counter force is applied to the mask sheet before laser pattern formation begins, and maintained throughout the scanning process. This preliminary application of force ensures the mask sheet remains in its initial position during the entire laser processing operation, preventing any position shifts that would cause pattern errors.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The counter force acts as a preliminary anti-action against the natural tendency of the mask sheet to shift or deform during laser processing. By applying this opposing force in advance and maintaining it during processing, the system prevents position drift before it can occur, ensuring pattern accuracy without requiring complex real-time adjustment mechanisms.

Inventive Principle:
Principle #9Preliminary anti-action

2Manufacturing precision

If the laser beam is scanned along the target scan line while counter force is applied, then the pattern position accuracy is improved, but the manufacturing time increases due to the additional steps of applying and releasing counter force

Engineering Contradiction:
Improvepattern position accuracyVSAvoidmanufacturing efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The counter force is applied continuously throughout the entire laser scanning process without interruption. This continuous application ensures that the mask sheet maintains its position throughout the complete pattern formation operation, eliminating the need for repeated adjustments or repositioning that would consume additional time and reduce manufacturing efficiency.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The counter force application is performed as a preliminary step before laser scanning begins, and once applied, it remains in place throughout the entire scanning operation. This approach consolidates the force application into a single continuous action rather than requiring multiple intermittent adjustments during processing, thereby improving manufacturing efficiency while maintaining pattern accuracy.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If the mask sheet is fixed to the mask frame under counter force, then the initial position is maintained during processing, but the device complexity increases due to the fixing mechanism requirements

Engineering Contradiction:
Improvemask sheet position stabilityVSAvoidfixing mechanism complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask sheet itself serves as the fixing element through its interaction with the mask frame under the applied counter force. The system utilizes the inherent properties of the mask sheet and frame combination, requiring no additional complex fixing mechanisms or external clamping devices. The counter force naturally maintains the mask sheet in its initial position throughout the laser processing operation.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The counter force acts as a counterbalancing force that prevents the mask sheet from shifting or deforming during laser processing. By applying this opposing force, the system maintains position stability without requiring complex mechanical fixing mechanisms, as the force itself serves as the stabilizing element throughout the processing operation.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively prevents pattern errors by ensuring the laser beam forms the pattern along the intended target scan line, maintaining the initial position of the mask sheet and enhancing the manufacturing quality of nano-sized patterns.

Implementation Method 1

a mask sheet is manufactured using a laser beam

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS9604314B2Method for forming a mask pattern using a laser
Publication Date: 2017.03.28 SAMSUNG DISPLAY CO LTD
  • US9604314B2 patent drawing
  • US9604314B2 patent drawing
  • US9604314B2 patent drawing

AI summary

A method of forming a pattern on a mask sheet using a laser beam includes determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet, determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet, applying a counter force to the mask sheet, fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet, scanning the laser beam along the correction scan line, and releasing the counter force which is applied to the mask sheet.