Laser Mask Deposition for OLED Fabrication
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Solution Overview
Problem
Conventional deposition apparatuses using fine metal masks face issues with mask sagging, leading to undesired deposition and alignment challenges in forming organic light emitting displays.
Innovation Solution
A deposition apparatus employing a laser mask system, where a laser oscillator generates mask laser beams that oxidize and deposit material onto a substrate, eliminating the need for a fine metal mask and simplifying alignment processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fine metal mask is used in the deposition apparatus, then the deposition material can be patterned on the substrate, but the mask sags during deposition causing alignment errors and undesired deposition
Solution Approach 1:
The patent replaces the mechanical fine metal mask system with a laser beam system. Instead of using a physical mask that sags and causes alignment issues, the invention uses laser beams to define the deposition pattern. The laser beams are generated by a laser oscillator and directed through optical elements to create a stable, sag-free masking effect during material deposition, thereby eliminating the reliability problem while maintaining manufacturing precision.
Solution Approach 2:
The patent introduces an intermediary system consisting of laser oscillators and optical elements between the deposition source and substrate. This intermediary laser field acts as a virtual mask that defines the deposition pattern without the physical constraints of a metal mask, solving the sagging problem while maintaining precise patterning capability.
2Manufacturing precision
If a fine metal mask is used for deposition patterning, then material deposition can be controlled, but complex mask alignment procedures are required
Solution Approach 1:
The patent replaces the complex mechanical mask alignment system with an optical laser system. The laser beams can be precisely controlled and positioned using optical elements without requiring physical mask alignment procedures. This substitution maintains deposition patterning control while dramatically reducing the complexity of alignment operations.
Solution Approach 2:
The patent employs a dynamic laser beam system that can be adjusted and repositioned flexibly during the deposition process. Unlike static metal masks that require precise mechanical alignment, the laser system can be dynamically controlled to achieve the desired patterning, simplifying the overall alignment complexity while maintaining precision.
3Productivity
If conventional deposition methods with metal masks are used, then deposition can be performed, but mask-related defects occur in the deposited organic light emitting layer
Solution Approach 1:
The patent replaces the metal mask system with a laser beam system to eliminate mask-related defects. The laser beams provide a clean, contactless masking method that prevents contamination and defects in the deposited organic light emitting layer, while maintaining full deposition capability and improving overall deposition quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents defects caused by fine metal masks and facilitates precise deposition without the need for complex mask alignment, enhancing the efficiency and accuracy of organic light emitting display fabrication.
Implementation Method 1
The mask laser beams are irradiated into the vacuum chamber to be disposed between the substrate and the deposition source, the deposition material making contact with the mask laser beams is oxidized
Implementation Method 2
a crucible filled with a deposition material, a nozzle spraying the deposition material
Data Source
AI summary
A deposition apparatus includes a vacuum chamber, a substrate disposed in the vacuum chamber, a deposition source disposed in the vacuum chamber and facing the substrate to provide a deposition material onto the substrate, a laser oscillator generating a first laser beam, and an optical unit connected to a first side of the vacuum chamber and splitting the first laser beam to generate a plurality of mask laser beams. The mask laser beams are irradiated into the vacuum chamber to be disposed between the substrate and the deposition source. The deposition material making contact with the mask laser beams is oxidized, and the deposition material passing through the mask laser beams is deposited on the substrate.