Laser Mask Manufacturing for Display Deposition Precision
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Solution Overview
Problem
Current mask manufacturing methods for display panels lack precision in the open areas, affecting the deposition quality of functional layers, which is crucial for improving the performance of display elements like organic light emitting diodes.
Innovation Solution
A laser processing method is employed to create a mask with a mask support part featuring a concave and protrusion structure, where pulse lasers with high overlap ratios are used to form the mask support part and opening parts, ensuring precise control over the mask's geometry and enhancing deposition quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional mask manufacturing methods are used, then the manufacturing process is simple, but the precision of open areas is insufficient
Solution Approach 1:
The patent replaces conventional mechanical mask manufacturing methods with laser processing technology. The laser beam precisely ablates the mask material to create open areas with high precision, eliminating the need for complex mechanical machining while achieving superior dimensional accuracy and surface quality in the open areas.
Solution Approach 2:
The patent utilizes controllable laser parameters (power, pulse duration, scanning speed, wavelength) to optimize the manufacturing process. By adjusting these parameters, the system achieves high precision in open area formation while maintaining process efficiency, resolving the contradiction between precision and complexity.
2Manufacturing precision
If the mask is placed close to the substrate for high precision deposition, then deposition quality improves, but shadow regions increase
Solution Approach 1:
The patent introduces a concave support structure with curved geometry beneath the mask. This curvature elevates the mask at strategic points, creating an optimized spatial relationship between the mask and substrate. The curved support profile allows the mask to maintain close proximity for high precision deposition while preventing contact that would cause shadow regions.
Solution Approach 2:
The patent adds a vertical dimension to the mask-substrate relationship by introducing the concave support structure. This elevates the mask in the Z-direction, creating controlled separation distances that prevent shadow regions while maintaining lateral precision for high quality deposition.
3Manufacturing precision
If the mask contacts the substrate, then deposition precision is maximized, but the mask and substrate become contaminated
Solution Approach 1:
The patent introduces a concave support structure as an intermediary element between the mask and substrate. This support structure maintains an optimal separation distance, preventing direct contact and contamination while still enabling high precision deposition through controlled positioning. The intermediary structure acts as a buffer that eliminates harmful direct interaction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method improves the deposition quality by maintaining a controlled separation distance between the mask and the substrate, reducing shadow regions and enhancing the precision of the deposited functional layers, thereby improving the overall performance of display elements.
Implementation Method 1
forming a mask support part including a concave part recessed from the first surface and a protrusion part adjacent to the concave part and protruding from the first surface by irradiating a first laser light to the first surface of the preliminary mask sheet
Implementation Method 2
forming an opening part adjacent to the protrusion part and penetrating the preliminary mask sheet by irradiating a second laser light on the second surface of the preliminary mask sheet
Data Source
AI summary
Provided is a mask manufacturing method including preparing a preliminary mask sheet including a first surface and a second surface facing each other, forming a mask support part including a concave part recessed from the first surface and a protrusion part adjacent to the concave part and protruding from the first surface by irradiating a first laser light to the first surface of the preliminary mask sheet, and forming an opening part adjacent to the protrusion part and penetrating the preliminary mask sheet by irradiating a second laser light on the second surface of the preliminary mask sheet.