Beam-Shaped Laser Mask Projection for Adjustable Fluence Width
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Solution Overview
Problem
Current laser processing systems face inefficiencies in adjusting laser light radiation widths to achieve optimal fluence and processing speed, leading to energy waste and suboptimal processing performance due to fixed or inflexible beam shaping configurations.
Innovation Solution
The laser processing apparatus incorporates a beam shaping optical system with a zoom condenser lens that allows independent adjustment of radiation widths in the direction parallel to short and long edges of the irradiated region, enabling precise control of fluence and processing parameters without the need for attenuators, thereby enhancing processing speed and reducing energy waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a fixed beam shaping configuration is used, then the device complexity is reduced, but the adaptability to adjust radiation widths for optimal fluence is worsened
Solution Approach 1:
The beam shaping optical system is designed with a zoom condenser lens that enables dynamic adjustment of the irradiated region size. The lens can change its focal length to independently adjust the radiation width in the direction parallel to the short edges of the mask, transforming a static optical system into a dynamic one that adapts to different processing requirements while maintaining optimal fluence distribution.
2Manufacturing precision
If the radiation width is adjusted to optimize fluence, then the manufacturing precision is improved, but the processing speed is worsened due to time-consuming adjustments
Solution Approach 1:
The zoom condenser lens enables rapid dynamic adjustment of the irradiated region width during processing. Instead of time-consuming manual reconfiguration, the lens focal length can be changed quickly to optimize fluence for different mask widths and processing conditions, maintaining high manufacturing precision while minimizing adjustment time.
Solution Approach 2:
The system changes the optical parameter (focal length) of the zoom condenser lens to adjust the radiation width. By varying this parameter, the fluence distribution can be optimized for different processing scenarios without requiring physical reconfiguration of the optical system, thereby maintaining both precision and speed.
3Ease of operation
If the irradiated region width does not match the mask width, then the ease of operation is improved, but the energy waste increases due to under- or over-irradiation
Solution Approach 1:
The zoom condenser lens allows dynamic changing of the irradiated region width parameter to precisely match the mask width. By adjusting the lens focal length, the system optimizes the correspondence between the irradiated region and mask dimensions, ensuring that laser energy is efficiently utilized without waste from over-irradiation or under-irradiation while maintaining ease of operation through automated control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for flexible adjustment of radiation widths to match the mask width, improving processing efficiency by optimizing fluence and reducing energy waste, thereby increasing throughput and achieving better processing performance.
Implementation Method 1
a beam shaping optical system configured to shape laser light in such a way that a first irradiated region of a mask configured to block part of the laser light
Implementation Method 2
a projection optical system configured to project a pattern on the mask onto the workpiece placed on the placement base
Implementation Method 3
The excimer laser light having photon energy higher than the chemical binding energy of a polymer material can unbind the chemically bonded molecules that form the polymer material
Implementation Method 4
Glass, ceramic, and other materials absorb excimer laser light by a large amount
Data Source
AI summary
A laser processing apparatus includes a placement base on which a workpiece is placed, a beam shaping optical system that shapes laser light such that a first laser light irradiated region of a mask blocking part of the laser light has a rectangular shape having short edges and long edges, the beam shaping optical system capable of causing one of a first radiation width of the first irradiated region in the direction parallel to the short edges and a second radiation width of the first irradiated region in the direction parallel to the long edges to be fixed and causing the other to be changed, a projection optical system that projects a pattern on the mask onto the workpiece, and a mover that moves the first irradiated region at least in the direction parallel to the short edges to move a second laser light irradiated region of the workpiece.