Laser Irradiation Mask for Organic Light Emitting Display Transfer

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Solution Overview

Problem

Conventional laser irradiation methods for organic light emitting displays often apply excessive energy, damaging the organic layers and degrading the quality of the transferred patterns during the laser-induced thermal imaging (LITI) process.

Innovation Solution

A laser irradiation apparatus with a mask patterned such that the upper and lower portions are longer than the middle portion, allowing for a non-uniform energy distribution where higher energy is applied to break bonds and lower energy is used for transfer, reducing damage and enhancing pattern quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional laser irradiation methods are used to transfer organic layers, then the organic layers can be transferred onto the substrate, but excessive energy damages the organic layers and degrades pattern quality

Engineering Contradiction:
Improvepattern qualityVSAvoidorganic layer damage
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The mask pattern is designed with different lengths in different regions: the upper and lower portions have longer patterned regions while the middle portion has a shorter patterned region. This creates local variations in laser energy distribution, allowing high energy concentration at the edges for effective bond breaking and transfer, while the middle region receives reduced energy to prevent organic layer damage.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask pattern introduces asymmetric energy distribution by making the upper and lower portions longer than the middle portion. This asymmetric design ensures that the laser beam delivers different energy levels to different regions of the organic layer, optimizing both transfer efficiency and damage prevention through non-uniform energy application.

Inventive Principle:
Principle #4Asymmetry

2Productivity

If uniform laser energy is applied across the entire organic layer, then transfer can be achieved, but excessive energy in certain regions causes damage

Engineering Contradiction:
Improvetransfer efficiencyVSAvoidorganic layer damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

Instead of uniform energy application, the mask creates localized energy concentration at the upper and lower portions where longer patterned regions focus the laser beam, while the middle portion with shorter patterned region receives reduced energy. This local quality variation optimizes transfer efficiency in critical areas while protecting vulnerable regions from damage.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If the mask pattern length is uniform, then the structure is simple, but the energy distribution is non-optimal causing both insufficient transfer and excessive damage

Engineering Contradiction:
Improvepattern qualityVSAvoidmask pattern complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask pattern is segmented into three distinct regions along the scanning direction: upper portion, middle portion, and lower portion, each with different patterned lengths. This segmentation allows independent optimization of energy distribution in each region, achieving optimal pattern quality while maintaining a relatively simple overall mask structure that can be manufactured.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus enables the transfer of organic layers using low-energy laser beams, reducing damage and improving the quality of the organic layer patterns, while maintaining efficient laser beam usage.

Implementation Method 1

the laser beam 150 is absorbed by a light-to-heat conversion layer of the donor substrate 120 and then converted to thermal energy

Methodology Applied
Scientific EffectLight-to-heat conversion: Absorption (EM radiation)

Implementation Method 2

the organic layer 130 is separated from the donor substrate 120 by the thermal energy, and is transferred onto the substrate 110 while bonding within the organic layer 130 is broken

Methodology Applied
Scientific EffectThermal energy breaking bonds: Thermolysis

Data Source

PatentUS7542063B2Laser irradiation apparatus and method of fabricating organic light emitting display using the same
Publication Date: 2009.06.02 SAMSUNG DISPLAY CO LTD
  • US7542063B2 patent drawing
  • US7542063B2 patent drawing
  • US7542063B2 patent drawing

AI summary

Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.