Surface Emitting Laser Mirror Layer Roughness Control

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Solution Overview

Problem

Surface emitting lasers used in atomic oscillators face a decrease in emission intensity due to surface roughness and carbon concentration issues, affecting their reliability and aging properties.

Innovation Solution

A surface emitting laser with a first mirror layer having a surface roughness Ra of 0.45 nm to 1.0 nm and a carbon concentration of 7.5×10^17 cm^-3 to 2.0×10^18 cm^-3 is developed, along with a manufacturing method that controls these parameters to enhance emission intensity and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the surface roughness of the first mirror layer is reduced to improve emission intensity, then the manufacturing precision requirement increases

Engineering Contradiction:
Improveemission intensityVSAvoidsurface roughness control precision
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent specifies a quantitative range for surface roughness (0.45 nm to 1.0 nm) to optimize the balance between emission intensity and manufacturing feasibility. This parameter change transforms a qualitative requirement into a controllable quantitative specification that guides manufacturing while ensuring performance.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the carbon concentration in the first mirror layer is increased to improve reliability, then the manufacturing complexity increases

Engineering Contradiction:
Improveaging propertiesVSAvoiddoping concentration control
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent establishes a specific carbon concentration range (7.5×10^17 cm^-3 to 2.0×10^18 cm^-3) in the first mirror layer to enhance reliability and aging properties. This quantitative parameter specification simplifies the doping process by providing clear target values rather than requiring complex iterative optimization.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the surface roughness is controlled within a specific range to reduce emission intensity decrease, then the manufacturing precision requirement increases

Engineering Contradiction:
Improveemission intensity stabilityVSAvoidsurface roughness measurement and control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent defines a specific surface roughness range (0.45 nm to 1.0 nm) that has been determined to optimize emission intensity stability. This parameter specification provides manufacturers with a clear target range, transforming a complex quality control requirement into a measurable and controllable specification.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS9484716B2Surface emitting laser, atomic oscillator, and manufacturing method of surface emitting laser
Publication Date: 2016.11.01 MICROCHIP TECHNOLOGY INC
  • US9484716B2 patent drawing
  • US9484716B2 patent drawing
  • US9484716B2 patent drawing

AI summary

A surface emitting laser includes: a substrate; and a laminated body disposed over the substrate, wherein the laminated body includes a first mirror layer disposed over the substrate, an active layer disposed over the first mirror layer, and a second mirror layer disposed over the active layer, and surface roughness Ra of an uppermost layer of the first mirror layer is greater than or equal to 0.45 nm and less than or equal to 1.0 nm.