Laser-Assisted MOCVD Precursor Cracking Efficiency

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Solution Overview

Problem

Low cracking efficiency of precursors in metal-organic chemical vapor deposition (MOCVD) hinders the production of high-quality semiconductor films, necessitating enhanced methods for precursor cracking.

Innovation Solution

Laser-assisted MOCVD devices are employed, featuring laser injectors and conduits that direct laser beams and precursors onto a rotatable substrate, enhancing precursor cracking efficiency by irradiating the precursors with laser beams before deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional MOCVD methods are used, then the process is simple and equipment is less complex, but precursor cracking efficiency is low

Engineering Contradiction:

Improveprecursor cracking efficiencyVSAvoidequipment complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines laser irradiation system with MOCVD equipment, merging two separate processes (laser cracking and chemical vapor deposition) into a single integrated system. The laser injectors are positioned within the MOCVD chamber to directly irradiate precursors before they reach the substrate, enabling simultaneous precursor activation and deposition in one equipment unit.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The laser irradiation is applied to precursors before they reach the substrate surface, performing preliminary cracking action in advance. The laser injectors are positioned to irradiate precursors during their transport through the chamber, activating them prior to deposition and improving cracking efficiency without requiring higher substrate temperatures.

Inventive Principle:

Principle #10Preliminary action

2Manufacturing precision

If higher substrate temperature is used to improve precursor cracking, then cracking efficiency increases, but thermal stress and defects increase

Engineering Contradiction:

Improveprecursor cracking efficiencyVSAvoidthermal stress and defects

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces thermal cracking mechanism with laser-induced chemical cracking. Instead of relying on high substrate temperature to crack precursors, the system uses laser beams to directly activate precursors in the gas phase or near-surface region, substituting thermal energy with optical energy for the cracking process.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The laser irradiation is applied locally to specific regions where precursors need cracking, rather than heating the entire substrate uniformly. The laser injectors are positioned to target precursor beams or specific areas on the substrate, creating localized activation zones without subjecting the whole substrate to high thermal stress.

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If longer laser exposure time is used, then precursor cracking efficiency improves, but productivity decreases

Engineering Contradiction:

Improveprecursor cracking efficiencyVSAvoiddeposition speed

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent employs periodic or pulsed laser irradiation rather than continuous exposure. The laser injectors can be activated in cycles or pulses, providing intermittent high-intensity irradiation that achieves effective cracking without requiring prolonged exposure. This periodic action maintains cracking efficiency while reducing total laser-on time and improving throughput.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The system incorporates dynamic control of laser parameters including intensity, duration, and positioning. The laser injectors can be moved or adjusted during operation, and irradiation parameters are optimized in real-time to achieve maximum cracking efficiency in minimum time, balancing quality with production speed.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly improves the cracking efficiency of precursors, leading to higher quality and efficiency in semiconductor epitaxy, enabling better performance in optoelectronic and power electronic devices.

Implementation Method 1

the outlet of each of the plurality of laser injectors directs one of the plurality of laser beams onto the rotatable substrate support surface disposed within the chamber

Methodology Applied

Scientific EffectLaser irradiation: Laser

Implementation Method 2

enhancing the cracking efficiency of precursors by irradiating the precursors with laser beams before deposition

Methodology Applied

Scientific EffectPhotodissociation: Photodissociation

Implementation Method 3

Laser-assisted metal-organic chemical vapor deposition (MOCVD) devices

Methodology Applied

Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS11486039B2Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

Publication Date: 2022.11.01 OHIO STATE INNOVATION FOUND

AI summary

Disclosed herein are laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof.