Two-Stage Laser Processing for Precise Modified Spot Formation

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Solution Overview

Problem

Current processing devices face challenges in meeting diverse processing requirements such as high parting force and damage control, compatibility, and precision in forming modified spots within objects.

Innovation Solution

A processing device that utilizes two stages of light irradiation, where the first light temporarily increases absorptivity in a partial region, followed by the second light to form a modified spot, allowing for adjustable parameters like energy, wavelength, and beam profile to meet various processing needs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single light source is used to form a modified spot, then the device structure is simple, but it is difficult to meet various processing requirements (high parting force, damage control, compatibility)

Engineering Contradiction:
Improveability to meet various processing requirementsVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The processing device divides the light irradiation process into two distinct stages using two separate light sources: first light for initiating absorptivity increase and second light for forming the modified spot. This segmentation allows each light source to be optimized for its specific function, enabling versatile processing while maintaining clear functional separation in the device structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention utilizes parameter changes in the object's absorptivity over time. The first light induces a temporary increase in absorptivity, which then enables the second light to form the modified spot. By controlling temporal parameter changes in absorptivity rather than spatial or material changes, the device achieves versatility without proportionally increasing structural complexity.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If high energy light is used to form a modified spot quickly, then productivity is improved, but damage to the workpiece increases

Engineering Contradiction:
Improvemodified spot formation speedVSAvoidworkpiece damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The first light performs a preliminary action by temporarily increasing the absorptivity of the object in the target region before the second light is applied. This preliminary modification of the object's optical properties allows the subsequent high-energy second light to be absorbed more efficiently and form the modified spot faster, thereby improving productivity while controlling damage through the preparatory absorptivity enhancement.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The first light acts as an intermediary that modifies the object's absorptivity state, creating favorable conditions for the second light to act effectively. This intermediary action enables the second light to deliver high energy for rapid modified spot formation without causing excessive damage, as the absorptivity increase ensures efficient energy coupling.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If the absorptivity increase period is extended to allow better energy coupling, then manufacturing precision is improved, but the processing time increases

Engineering Contradiction:
Improvemodified spot formation precisionVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The invention employs periodic action by applying the first light in a controlled temporal pattern to induce absorptivity increase, then immediately follows with the second light during the absorptivity increase period. This periodic sequencing of light applications allows optimization of the absorptivity increase duration for precision while maintaining short overall processing time through the coordinated timing of the two light sources.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the formation of modified spots with high added value, allowing for precise control over parting force, damage, and processing outcomes, thereby enhancing the device's versatility and effectiveness.

Implementation Method 1

the absorptivity is temporarily increased in a partial region of the object (for example, near a focal point of the light: hereinafter, also referred to as a 'partial region' only)

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

energy is supplied to the partial region, and the partial region having a high temperature is expanded

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

the partial region having a high temperature is expanded

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS12030136B2Processing device
Publication Date: 2024.07.09 HAMAMATSU PHOTONICS KK
  • US12030136B2 patent drawing
  • US12030136B2 patent drawing
  • US12030136B2 patent drawing

AI summary

A processing device forms, in an object to be processed, a modified spot constituting a modified region. The processing device includes a first irradiation unit configured to irradiate the object with first light to temporarily increase absorptivity in a partial region of the object as compared with the absorptivity before irradiation of the first light, and a second irradiation unit configured to irradiate the partial region with second light in an absorptivity increase period in which the absorptivity of the partial region is temporarily increased.