Laser Device Optical Element Module on Separate Plate
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Solution Overview
Problem
The existing EUV light source systems require a large footprint in semiconductor manufacturing lines due to the need for multiple amplifier units and optical elements, leading to inefficient operation and instability in laser output caused by decentralized optical paths and susceptibility to floor vibrations.
Innovation Solution
A compact laser device configuration where the oscillator and amplifier units are arranged to share a common surface or intersect with a central plate, reducing the optical path length and allowing for centralized mounting of optical elements, thereby minimizing the footprint and enhancing operational stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If multiple amplifier units and optical elements are arranged in a decentralized configuration, then the laser output power can be increased to 10 kW, but the occupied floor space becomes excessively large
Solution Approach 1:
The patent combines multiple amplifier units and optical elements into a single integrated housing structure. The oscillator unit and amplifier units are merged into one compact laser device, with optical elements arranged on a common plate within the housing. This merging eliminates the need for separate decentralized arrangements while maintaining the 10 kW output capability.
Solution Approach 2:
The patent transitions from a two-dimensional decentralized floor arrangement to a three-dimensional integrated structure. Optical elements are mounted on a vertical plate within the housing, utilizing the vertical dimension and internal space of the housing rather than spreading components across the floor plane. This dimensional reorganization dramatically reduces the footprint.
2Power
If optical elements are arranged in a decentralized configuration, then the laser output power can be maintained, but the alignment stability becomes poor due to floor vibrations
Solution Approach 1:
By merging all optical elements into a single integrated housing, the patent eliminates the relative motion between separately positioned components that would be caused by floor vibrations. The oscillator and amplifiers are fixed in predetermined positions within the housing, creating a rigid optical path that maintains alignment stability while preserving laser output power.
3Power
If multiple separate amplifier units are used, then the required laser output power can be achieved, but the device complexity and number of components increases
Solution Approach 1:
The patent merges multiple amplifier units into a single integrated housing with a unified optical path. Instead of using four separate amplifier units with individual optical elements and power supplies, the invention combines them into one device with a consolidated structure, reducing component count and complexity while maintaining the required 10 kW output power.
4Reliability
If optical elements are mounted on separate vibration isolators, then the laser output can be stabilized, but the occupied space and operational complexity increase
Solution Approach 1:
By integrating all optical elements into a single rigid housing structure, the patent eliminates the need for separate vibration isolators for each component. The unified structure provides inherent mechanical stability and vibration resistance, maintaining laser output stability while dramatically reducing the occupied space compared to decentralized isolated mounting.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the occupied space, improves maintenance efficiency, and stabilizes the laser output by centralizing optical elements and reducing the impact of floor vibrations, ensuring long-term stability and efficiency in semiconductor manufacturing.
Implementation Method 1
a CO2 laser and so on are employed... the short-pulse laser light generated and emitted by a driver laser device
Data Source
AI summary
A laser device, which includes an oscillator unit having a rectangular-solid-shaped housing containing a laser oscillator for generating and outputting a laser light; an amplifier unit having a rectangular-solid-shaped housing containing an amplifier that receives and amplifies the laser light to output; and, a group of optical elements including optical elements provided on a laser light path, wherein the laser device includes one or more amplifier units, and the oscillator and the amplifier units are arranged such that surfaces having a wide area other than a surface having a smallest area of a housing of the oscillator unit and a housing of at least one amplifier unit are next to and face each other, or such that surfaces having a wide area other than a surface having a smallest area of a housing of at least two amplifier units are next to and face each other.