Laser Optics Layout for Uniform Substrate Heating
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in achieving uniform heating of substrates without rotating the substrate, which affects the flow velocity of treatment liquids and the thickness of liquid films, and also impose a burden on the durable lifespan of optical fibers due to high-speed repetitive movements.
Innovation Solution
A substrate treating apparatus with a laser unit that includes rotatable cylindrical lenses and a reflection member with an inclined surface to change the laser beam path, allowing for uniform heating without substrate rotation, while minimizing the burden on optical fibers by rotating these components instead.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the substrate is rotated rapidly to achieve uniform heating, then the heating uniformity is improved, but the flow velocity of treatment liquid and liquid film thickness are adversely affected
Solution Approach 1:
Instead of rotating the substrate to achieve uniform heating, the invention inverts the approach by keeping the substrate stationary and rotating the laser beam irradiation direction. This is accomplished by rotating the cylindrical lenses and reflection member, which changes the laser beam's travel path while maintaining a fixed substrate position, thereby achieving uniform heating without disrupting the treatment liquid flow and liquid film thickness
2Adaptability or versatility
If the laser irradiation direction is changed by moving the laser beam, then the irradiation location is changed, but the optical fiber and cable durability are adversely affected due to high-speed repetitive movement
Solution Approach 1:
The invention replaces the mechanical movement of the laser irradiation unit with an optical path rotation system. Instead of physically moving the laser source and its connected optical fibers, the system uses rotatable cylindrical lenses and a reflection member to change the laser beam's travel path. This substitution eliminates the high-speed repetitive movement of optical fibers, thereby improving their durability while maintaining the ability to change irradiation locations across the substrate surface
3Ease of operation
If the laser beam polarization direction is not rotated with irradiation location, then the irradiation location can be changed easily, but the heating conditions become non-uniform and precise heating control is difficult
Solution Approach 1:
The invention merges the rotation of the laser beam's travel path with the rotation of its polarization direction by using a rotatable cylindrical lens system. As the cylindrical lenses and reflection member rotate to change the irradiation location, they simultaneously rotate the polarization direction of the laser beam. This combined rotation ensures that the polarization state is maintained consistently relative to the substrate, achieving both easy irradiation location change and precise uniform heating control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves uniform heating of substrates with minimized optical fiber wear, allowing for precise control of heating conditions and reducing deviations in liquid film thickness without substrate rotation.
Implementation Method 1
a cylindrical lens that rotates the laser beam
Implementation Method 2
a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens
Implementation Method 3
a laser unit that irradiates a laser beam to the substrate supported by the support unit
Data Source
AI summary
The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiation member that irradiates the laser beam, a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable, and a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.