Laser Irradiation Overlap Control for Precise Surface Patterning

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Solution Overview

Problem

Existing processing apparatuses struggle to accurately form structures on objects using laser light, particularly in forming precise patterns and patterns that extend in desired directions, due to limitations in controlling the overlap and relative positioning of irradiation areas.

Innovation Solution

A processing apparatus and system that utilize a light irradiation apparatus to form multiple overlapping irradiation areas with controlled overlap states, combined with movable apparatuses to adjust relative positions and optical systems to direct processing lights, enabling precise pattern formation on objects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If multiple processing lights are used to form overlapping irradiation areas, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improvepattern formation precisionVSAvoidlight irradiation apparatus complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The processing apparatus divides a single laser beam into multiple processing lights using optical splitting elements (beam splitters, mirrors, or diffraction gratings). Each processing light forms a separate irradiation area on the object, and by controlling the overlap of these areas, precise pattern formation is achieved. This segmentation approach allows multiple irradiation zones to be processed simultaneously or sequentially with high precision without requiring multiple independent laser sources.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs movable apparatuses that operate in different spatial dimensions to adjust the relative positions of irradiation areas. By introducing controlled movement in specific directions (along the surface or perpendicular to it), the system can create and modify overlapping patterns dynamically, enabling precise structure formation while maintaining a relatively simple optical configuration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If movable apparatuses are used to adjust relative positions of irradiation areas, then manufacturing precision is improved, but productivity decreases

Engineering Contradiction:
Improverelative positioning precisionVSAvoidprocessing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The movable apparatuses are configured to pre-adjust the relative positions of irradiation areas before the actual processing begins. By establishing the correct geometric arrangement and overlap of processing lights in advance, the system eliminates the need for continuous real-time adjustments during processing, thereby maintaining high positioning precision while avoiding productivity losses from frequent movements.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system incorporates movable components that can dynamically adjust the position and orientation of irradiation areas during processing. This dynamic capability allows the apparatus to adapt to different processing requirements and maintain optimal positioning without requiring complete reconfiguration, thus balancing precision and productivity.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If the overlap state of irradiation areas is changed, then manufacturing precision is improved, but loss of time increases

Engineering Contradiction:
Improvepattern structure precisionVSAvoidtime for changing overlap state
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The processing apparatus employs periodic or pulsed illumination modes where the processing lights are activated in sequences or patterns. By using periodic action, the system can create complex overlapping patterns through time-multiplexed illumination, achieving high precision pattern formation without requiring continuous physical movement or reconfiguration of the optical paths, thus minimizing time loss.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the formation of desired pattern structures with high precision and control, allowing for the creation of structures that extend in specific directions on the object's surface.

Implementation Method 1

a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area

Methodology Applied
Scientific EffectLaser: Laser

Data Source

PatentUS20260097451A1Processing apparatus, processing method and processing system
Publication Date: 2026.04.09 NIKON CORP
  • US20260097451A1 patent drawing
  • US20260097451A1 patent drawing
  • US20260097451A1 patent drawing

AI summary

A processing apparatus is a processing apparatus that irradiates a surface of an object with processing light to process an object and is provided with: a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area, at least a part of which overlaps with the first irradiation area, on the surface, and has a change member that is configured to change a state of an overlap between the first and second irradiation areas.