Semiconductor Laser Pad Structure for Solder Diffusion Control

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Solution Overview

Problem

Existing semiconductor lasers face challenges in achieving high reliability due to solder diffusion issues during junction-down mounting, which can lead to heat-related output saturation and degradation, despite the use of barrier materials like molybdenum and titanium.

Innovation Solution

A semiconductor laser design that includes a substrate, first and second cladding layers, an active layer, and a pad metal structure where the upper and side portions of the pad metal are covered with an insulating film and barrier metal, with the barrier metal and bonding metal sequentially deposited on the pad metal, enhancing heat dissipation and preventing solder diffusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If junction-down mounting is used to improve heat dissipation, then heat dissipation performance is improved, but solder diffusion to the electrode occurs causing reliability degradation

Engineering Contradiction:
Improveheat dissipation performanceVSAvoidreliability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The protective coating is segmented into multiple layers: a lower barrier metal layer (Ti, Mo, W) that provides solder diffusion barrier, and an upper insulating film layer (SiO2, Si3N4) that provides additional protection. This segmentation allows each layer to perform its specific function optimally while working together to prevent solder diffusion during junction-down mounting.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The barrier metal and insulating film act as intermediary protective layers between the electrode and the solder. These intermediary layers prevent direct contact between the solder and the electrode, thereby preventing solder diffusion while allowing the heat dissipation function to be maintained through proper thermal design.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If barrier metal layers are added to prevent solder diffusion, then reliability is improved, but device complexity increases

Engineering Contradiction:
ImprovereliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The harmful function of solder diffusion is extracted and isolated from the electrode by introducing dedicated barrier layers. The barrier metal and insulating film are specifically designed to take out the protective function from the overall device structure, allowing the electrode to maintain its original electrical and optical functions while the barrier layers handle the protective function.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If the pad metal surface is fully covered with protective layers, then solder diffusion is prevented, but heat dissipation efficiency decreases

Engineering Contradiction:
Improvesolder diffusion preventionVSAvoidheat dissipation efficiency
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The protective coating is applied with local quality consideration: the barrier metal layer is positioned at the lower portion of the pad metal where solder diffusion is most likely to occur, while the insulating film covers the upper portion. This localized protection approach prevents solder diffusion at critical areas while minimizing the impact on heat dissipation pathways.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed design significantly improves the reliability of semiconductor lasers by effectively preventing solder diffusion and heat-related degradation, maintaining high output performance and extending the lifespan of the device.

Implementation Method 1

an upper portion of the pad metal on a side of the pad metal opposite to a side closer to the substrate and a side portion of the pad metal are covered with an insulating film and barrier metal

Methodology Applied
Scientific EffectPhysical barrier protection: Physical Containment

Implementation Method 2

the barrier metal and a bonding metal are disposed in this order on the pad metal on the side of the pad metal opposite to the side closer to the substrate

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 3

a substrate, a first cladding layer of a first conductivity type, an active layer, a second cladding layer of a second conductivity type, and a pad metal in this order

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240162686A1Semiconductor laser
Publication Date: 2024.05.16 SONY GROUP CORP
  • US20240162686A1 patent drawing
  • US20240162686A1 patent drawing
  • US20240162686A1 patent drawing

AI summary

To provide a semiconductor laser capable of further improving reliability. Provided is a semiconductor laser including a substrate, a first cladding layer of a first conductivity type, an active layer, a second cladding layer of a second conductivity type, and a pad metal in this order, in which an upper portion of the pad metal on a side of the pad metal opposite to a side closer to the substrate and a side portion of the pad metal are covered with an insulating film and a barrier metal, and the barrier metal and a bonding metal are disposed in this order on the pad metal on the side of the pad metal opposite to the side closer to the substrate.