Laser Multi-Point Pattern Switching for Mismatched Processing Grids

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing laser processing systems face challenges in maintaining high throughput when the number of rows and columns of a processing area do not align with the number of rows and columns of a multi-point pattern, leading to inefficient use of laser light and increased time for DOE replacement and fluence adjustment.

Innovation Solution

Incorporation of a light shielding plate and a second actuator to selectively shield rows and columns of a multi-point pattern, allowing for the selection of different patterns to align with the processing area requirements, and a laser processing processor to control the movement and selection of these patterns for each step position.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the number of rows and columns of the processing area does not align with the number of rows and columns of the multi-point pattern, then the throughput decreases and time is lost for DOE replacement and fluence adjustment, but using a fixed multi-point pattern leads to inefficient use of laser light

Engineering Contradiction:
ImprovethroughputVSAvoidinefficient use of laser light
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent divides the multi-point pattern into selectable subsets by introducing a light shielding plate that can block specific rows and columns. This segmentation allows the system to use only the necessary portion of the laser light pattern for the given processing area size, avoiding waste of laser energy on unnecessary points while maintaining high throughput.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent makes the light shielding plate movable and controllable, allowing dynamic adjustment of which rows and columns are shielded. This dynamic capability enables the system to adapt the multi-point pattern to different processing area dimensions in real-time, eliminating the need for DOE replacement and fluence readjustment while optimizing laser light usage.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If the processing area dimensions do not match the multi-point pattern dimensions, then DOE replacement and fluence readjustment are required, but these operations reduce productivity

Engineering Contradiction:
Improvepattern alignmentVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent creates a virtual selection of different multi-point patterns by using a light shielding plate to block portions of a single multi-point pattern. This copying approach allows the system to simulate multiple pattern configurations without physically replacing the DOE, thereby maintaining pattern alignment precision while avoiding productivity loss from replacement operations.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent changes the effective pattern parameters by selectively shielding rows and columns of the multi-point pattern. This parameter adjustment allows the system to adapt to different processing area dimensions by modifying which laser points are active, eliminating the need for DOE replacement and fluence readjustment while maintaining precise pattern alignment.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If a light shielding plate is added to selectively shield rows and columns, then pattern adaptability improves, but device complexity increases

Engineering Contradiction:
Improvepattern selection capabilityVSAvoidoptical system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces a light shielding plate as an intermediary element between the multi-point pattern source and the workpiece. This intermediary component enables pattern adaptability by selectively blocking laser beams, providing versatility without requiring complex modifications to the core optical system or laser source.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Maintains high throughput by optimizing the use of laser light patterns even when the processing area dimensions do not match the multi-point pattern dimensions, reducing the need for DOE replacement and fluence readjustment.

Implementation Method 1

a diffractive optical element configured to divide first laser light into a plurality of beams of second laser light

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

a light concentrating optical system configured to generate a multi-point pattern in which a plurality of concentration spots are arranged in a grid-like manner in a row direction and a column direction by concentrating the plurality of beams of second laser light

Methodology Applied
Scientific EffectOptical focusing: Focusing

Data Source

PatentUS20250269464A1Laser processing apparatus, laser processing apparatus control method, and electronic device manufacturing method
Publication Date: 2025.08.28 GIGAPHOTON INC
  • US20250269464A1 patent drawing
  • US20250269464A1 patent drawing
  • US20250269464A1 patent drawing

AI summary

A laser processing apparatus includes a diffractive optical element dividing first laser light into beams of second laser light and output the second laser light, a light concentrating optical system generating a multi-point pattern in which concentration spots are arranged in a grid-like manner, a first actuator moving a workpiece, a light shielding plate capable of shielding at least one row and at least one column of the multi-point pattern, a second actuator changing a relative position of the light shielding plate with respect to the multi-point pattern so as to select one of first to fourth multi-point patterns, and a laser processing processor controlling the first actuator to move the workpiece such that any one of the first to fourth multi-point patterns is radiated to each step position and controlling the second actuator to select one of the first to fourth multi-point patterns for each step position.