Laser Patterning Nanostructure-Films Roll-to-Roll

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Solution Overview

Problem

Current nanostructure-film patterning methods, such as photolithography and chemical etching, are inadequate for meeting the demands of high-resolution, high-throughput, and application-specific requirements in emerging fields like nanotechnology and electronics.

Innovation Solution

A laser-based patterning method using a solid state UV laser or other types of lasers for etching nanostructure-films, particularly on a roll-to-roll apparatus, allowing for high-resolution patterning at low power levels and high speeds, with control over pulse duration and flux to minimize collateral damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photolithography and conventional chemical etching are used for patterning, then manufacturing precision can be achieved, but productivity is low and the process is complex

Engineering Contradiction:
Improvepatterning resolutionVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces conventional photolithography and chemical etching processes with direct laser writing. The laser beam directly patterns the nanostructure film without requiring photoresist coatings, development steps, or chemical etchants. This substitution of mechanical/chemical processes with optical direct writing achieves both high resolution (down to 5-10 microns) and high throughput, especially in roll-to-roll configuration where the film moves continuously under the laser beam at speeds of 1-2 meters per second.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts and eliminates multiple intermediate steps from the conventional patterning process. By using direct laser writing, it removes the need for photoresist application, photolithography exposure, chemical development, and chemical etching steps. This extraction of unnecessary process steps simplifies the overall manufacturing process while maintaining patterning precision and significantly increasing productivity.

Inventive Principle:
Principle #2Taking out (Extraction)

2Manufacturing precision

If batch processing is used for patterning, then manufacturing precision can be maintained, but productivity is low due to handling only one component at a time

Engineering Contradiction:
Improvepatterning qualityVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent transitions from static batch processing to dynamic continuous processing. In the roll-to-roll implementation, the nanostructure film moves continuously through the laser patterning zone while the laser beam tracks and patterns the moving film. This dynamic process maintains patterning precision through real-time laser control and positioning systems while achieving high throughput by processing continuous rolls of material rather than individual components sequentially.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements continuous laser patterning on continuously moving roll-to-roll nanostructure films. The laser beam operates continuously as the film passes through the processing zone, eliminating the start-stop nature of batch processing. This continuity of useful action maintains consistent patterning quality across the entire film while dramatically increasing productivity by processing large areas in a single continuous operation rather than handling one component at a time.

Inventive Principle:
Principle #20Continuity of useful action

3Productivity

If high power laser levels are used for etching, then productivity increases, but object-generated harmful factors increase due to collateral damage

Engineering Contradiction:
Improveetching speedVSAvoidcollateral damage
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent employs pulsed laser operation rather than continuous high-power irradiation. The laser delivers energy in controlled pulses with specific duration and frequency, allowing the material to be etched effectively while preventing excessive heat accumulation and collateral damage. The pulsed nature of the laser action enables high etching speeds when needed while allowing cooling intervals that prevent thermal damage to surrounding areas, thus resolving the contradiction between productivity and harmful effects.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent utilizes precise control of laser parameters including pulse duration, pulse frequency, peak power, and duty cycle to optimize the etching process. By adjusting these parameters, the laser can operate at low average power levels that prevent collateral thermal damage while still achieving high etching rates through optimized pulse characteristics. This parameter control allows the system to adapt to different material types and desired etching depths without causing harmful side effects.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient, high-resolution patterning of nanostructure-films with preserved material properties, reducing capital costs and increasing throughput, suitable for applications like transparent electrodes and optoelectronic devices.

Implementation Method 1

laser ablation to pattern the nanostructure-film

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The laser used is preferably a solid state UV laser. Such a laser has proven effective in patterning nanostructure-films in single passes and at resolutions below 5-10 microns

Methodology Applied
Scientific EffectAblation: Ablation

Data Source

PatentUS8178028B2Laser patterning of nanostructure-films
Publication Date: 2012.05.15 SAMSUNG ELECTRONICS CO LTD
  • US8178028B2 patent drawing
  • US8178028B2 patent drawing
  • US8178028B2 patent drawing

AI summary

A novel nanostructure-film patterning method is discussed, wherein a laser is employed to etch a nanostructure-film. The laser may be a solid state UV laser, and the nanostructure-film may be patterned while mounted and moving on a roll-to-roll apparatus.