Laser Patterning Process for OLED Organic Layer Transfer

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Solution Overview

Problem

Existing methods for fabricating Organic Light Emitting Displays (OLEDs) using laser irradiation face challenges in achieving uniform organic layer patterns due to the need for high-intensity laser radiation, which can damage the organic layer, and low-intensity radiation fails to adequately cut connections, resulting in non-uniform patterns.

Innovation Solution

A laser irradiation device with a mask incorporating a Fresnel lens is used to adjust the optical path, allowing for partial control of laser density, reducing damage to the organic layer and improving pattern quality by concentrating high-intensity radiation where needed and using lower intensity radiation elsewhere.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high-intensity laser radiation is applied to transfer the organic layer, then the organic layer is successfully separated and transferred from the donor substrate, but the organic layer is damaged

Engineering Contradiction:
Improvetransfer successVSAvoidorganic layer damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by using a mask with variable transmission regions that allow different laser intensities to reach different areas of the organic layer. The mask includes a first region with higher transmission for areas requiring stronger laser action and a second region with lower transmission for areas sensitive to intense radiation, enabling localized control of laser intensity to prevent damage while ensuring effective transfer

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the transmission parameter of the mask across different regions to modulate the laser intensity. By varying the transmission characteristics of the mask material or structure in different zones, the laser radiation intensity is adjusted to match the specific requirements of each region, achieving both effective layer separation and damage prevention

Inventive Principle:
Principle #35Parameter changes

2Object-affected harmful factors

If low-intensity laser radiation is applied, then the organic layer is protected from damage, but the connection in the organic layer is insufficiently cut resulting in non-uniform patterns

Engineering Contradiction:
Improveorganic layer damageVSAvoidpattern uniformity
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The mask is designed with spatially varying transmission properties where different regions have different transmission rates. This allows low-intensity radiation to be applied to sensitive areas while simultaneously providing higher intensity to areas requiring thorough connection cutting, achieving both protection and pattern uniformity through localized quality variation

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The mask is segmented into multiple functional regions with distinct transmission characteristics. This segmentation enables independent optimization of laser intensity for different areas of the organic layer, ensuring that each region receives the appropriate intensity level needed for its specific requirements

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of uniform organic layer patterns while minimizing damage to the OLED, enhancing the efficiency of the laser irradiation process and improving the quality of the transferred layers.

Implementation Method 1

a mask including a Fresnel lens for changing an optical path

Methodology Applied
Scientific EffectFresnel lens: Fresnel Lens

Implementation Method 2

the laser radiation is refracted through the projection lens and then irradiated onto the donor substrate

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS8946593B2Laser patterning process
Publication Date: 2015.02.03 SAMSUNG DISPLAY CO LTD
  • US8946593B2 patent drawing
  • US8946593B2 patent drawing
  • US8946593B2 patent drawing

AI summary

In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined portion of the mask to change an optical path. When an organic layer pattern is formed using the laser irradiation device, laser radiation is irradiated onto a region of an organic layer, which is to be cut, and the laser radiation is appropriately irradiated onto a region of the organic layer, which is to be separated from a donor substrate. The laser radiation irradiated onto an edge of the organic layer pattern has a laser energy density greater than that of the laser radiation irradiated onto other portions of the organic layer pattern. As a result, it is possible to form a uniform organic layer pattern and reduce damage of the organic layer.