Laser Performance Display for Maintenance Scenario Forecasting
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Solution Overview
Problem
Chromatic aberration in semiconductor exposure apparatuses due to the large spectral line width of KrF and ArF excimer laser devices leads to decreased resolution, necessitating line-narrowed laser devices, but existing display methods fail to effectively convey the impact of maintenance scenarios on performance.
Innovation Solution
A display method and apparatus that utilizes a trained model to estimate laser device performance, connecting actual data with estimation results, and displaying their temporal transitions to facilitate understanding of maintenance scenarios.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If line narrowing elements are added to the laser resonator to narrow spectral line width, then chromatic aberration is reduced and resolution is improved, but device complexity increases
Solution Approach 1:
The patent applies preliminary action by performing maintenance scenarios (such as replacing components or adjusting parameters) before the laser device actually degrades to a critical state. The system uses a trained model to estimate future performance and displays temporal transitions of both actual and estimated data, allowing operators to take preventive maintenance actions based on projected degradation trends rather than waiting for actual performance loss.
2Loss of information
If actual data alone is displayed for monitoring laser device performance, then measurement simplicity is maintained, but understanding of maintenance impact is insufficient
Solution Approach 1:
The patent applies copying by creating a virtual model (estimated data) that replicates and predicts the behavior of the actual laser device based on historical data and trained models. This estimated data copy is then displayed alongside actual measurement data, allowing operators to compare real-time performance with predicted performance under various maintenance scenarios without adding complex physical measurement systems.
3Loss of information
If maintenance scenarios are evaluated without visual temporal comparison, then analysis simplicity is maintained, but comprehension of performance changes is difficult
Solution Approach 1:
The patent applies dimensionality change by adding the time dimension to performance data visualization. Instead of displaying static performance parameters, the system displays temporal transitions of both actual and estimated data over time, enabling operators to visually comprehend how performance evolves and how maintenance scenarios affect future performance trajectories. This temporal dimension transforms complex performance changes into visually intuitive trends.
Data Source
AI summary
A display method is for displaying estimation result data of a feature of a laser device after an estimation start timing, the estimation result data being obtained using a trained model and actual data of the laser device up to the estimation start timing. The display method includes storing the actual data and the estimation result data, generating a display screen in which temporal transition of the actual data and temporal transition of the estimation result data are connected and displayed, and displaying the display screen.