Laser-Plasma Light Source Beam Focusing to Prevent Surface Damage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing light source apparatuses face challenges in achieving a longer service life of components and stable output power due to damage from energy beam irradiation, particularly in laser-produced plasma systems.
Innovation Solution
The apparatus employs a dual-focusing density irradiation method using energy beams with specific focusing densities to avoid direct impact on rotating body surfaces, alternating between regions with adhered plasma raw material and diffused spaces, ensuring the beams do not damage the components while maintaining efficient plasma generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-density energy beam irradiation is applied to generate plasma, then plasma generation efficiency is improved, but component service life deteriorates due to surface damage
Solution Approach 1:
The irradiation process is segmented into two distinct phases with different focusing densities. The first phase uses high focusing density to efficiently generate plasma, while the second phase uses low focusing density to prevent surface damage. This segmentation allows each phase to optimize its function without compromising the other.
Solution Approach 2:
The irradiation is performed periodically by alternating between high-density and low-density focusing modes. The high-density irradiation generates plasma efficiently, followed by low-density irradiation that prevents cumulative surface damage, creating a periodic cycle that maintains both efficiency and component longevity.
2Power
If high focusing density is used for plasma generation, then radiation output power is improved, but component reliability deteriorates due to beam damage
Solution Approach 1:
Different regions of the target surface are subjected to different focusing densities. The first region receives high focusing density irradiation optimized for plasma generation and high radiation output, while the second region receives low focusing density irradiation that prevents surface damage and maintains component reliability.
Solution Approach 2:
The focusing density parameter is dynamically changed between two distinct values during the irradiation process. The first focusing density is set high to maximize plasma generation and radiation output power, while the second focusing density is set low to prevent surface damage and maintain component reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach extends the service life of rotating bodies and stabilizes radiation output power by preventing surface damage and optimizing plasma generation efficiency.
Implementation Method 1
a light source apparatus is known, which generates plasma by focusing a laser beam on a droplet of a high-temperature plasma raw material
Implementation Method 2
The LPP light source apparatus generates high-temperature plasma by exciting EUV radiation species by a laser beam or the like
Implementation Method 3
the liquid plasma raw material is supplied to the energy beam irradiation region by centrifugal force of the rotating body
Implementation Method 4
The material is then irradiated with a laser beam to be vaporized, and then high-temperature plasma is generated by discharge
Implementation Method 5
The material is then irradiated with a laser beam to be vaporized
Implementation Method 6
The DPP light source apparatus applies high voltage between electrodes between which a gaseous plasma raw material (discharge gas) containing EUV radiation species is supplied to generate a high-density, high-temperature plasma by discharge
Data Source
AI summary
According to an embodiment of the present technology, there is provided a light source apparatus that converts a liquid raw material into plasma and extracts radiation by using irradiation with an energy beam, the light source apparatus including: a first member that includes a first region to which the liquid raw material has adhered with a first film thickness; and a beam source that irradiates the first region with the energy beam at a first focusing density and irradiates a first space with the energy beam at a second focusing density, the first space being a space in which the liquid raw material is diffused by the irradiation with the energy beam at the first focusing density, the first focusing density being a focusing density at which the energy beam does not reach the first member when the first region is irradiated with the energy beam.