Laser-Sustained Plasma Ignition via Corona Discharge

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Solution Overview

Problem

Existing laser-sustained plasma light sources require high-current, high-voltage ignition pulses that can damage the lamp and generate harmful electromagnetic pulses, limiting electrode design and requiring special shielding.

Innovation Solution

A low-power, high-voltage DC or AC power supply is used to create a corona or glow discharge within the gas environment, heating it sufficiently for plasma ignition without producing an arc discharge, allowing for finer electrode configurations and reduced electromagnetic interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high-current, high-voltage ignition pulses are used to create arc discharge, then plasma ignition is achieved, but the lamp and electrodes are damaged and electromagnetic pulses are generated

Engineering Contradiction:
Improvelamp durabilityVSAvoidelectromagnetic pulse damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The invention changes the electrical discharge parameters from high-current arc discharge to low-current corona or glow discharge. This parameter change allows plasma ignition to occur without the damaging high-current pulse, thereby protecting the lamp and electrodes while eliminating harmful electromagnetic pulses.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the mechanical/electrical arc discharge system with a corona or glow discharge system. This substitution eliminates the need for high-current pulses while still achieving the necessary gas heating and ionization for plasma sustainment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If high-current arc discharge is used for ignition, then plasma is ignited, but electrode design is limited and special shielding is required

Engineering Contradiction:
Improveelectrode configuration flexibilityVSAvoidshielding requirements
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

By changing the discharge type from arc to corona or glow discharge, the invention enables greater electrode configuration flexibility. The lower current requirements allow for finer electrode elements and more versatile placements without the need for robust, high-current-rated components and associated shielding.

Inventive Principle:
Principle #35Parameter changes

3Use of energy by moving object

If cold gas is used in the lamp, then laser absorption is reduced, but plasma ignition becomes difficult

Engineering Contradiction:
Improvelaser absorption efficiencyVSAvoidplasma ignition reliability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The invention applies preliminary action by using corona or glow discharge to pre-heat and pre-ionize the gas before the laser is applied. This preliminary treatment creates the necessary conditions for reliable plasma ignition while maintaining the gas at temperatures that allow subsequent laser absorption.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach eliminates the risk of damage to the lamp and reduces electromagnetic interference, enabling the use of smaller, non-tungsten electrodes and flexible electrode placement, while maintaining plasma sustainability with lower current levels.

Implementation Method 1

A power supply applies a potential to the electrode, where the power supply is sufficient to create a corona or a glow discharge at the electrode within the gas environment

Methodology Applied
Scientific EffectCorona discharge: Corona Discharge

Implementation Method 2

A power supply applies a potential to the electrode, where the power supply is sufficient to create a corona or a glow discharge at the electrode within the gas environment

Methodology Applied
Scientific EffectGlow discharge: Electric Glow Discharge

Implementation Method 3

Absorption of the laser by hot gas or the plasma is due to higher population of excited energy states in the hot gas

Methodology Applied
Scientific EffectAbsorption of laser by hot gas: Absorption (EM radiation)

Implementation Method 4

Absorption of the laser by hot gas or the plasma is due to higher population of excited energy states in the hot gas and to free electron absorption in the plasma

Methodology Applied
Scientific EffectFree electron absorption: Absorption (EM radiation)

Implementation Method 5

A pump laser source focuses a laser beam within the gas environment, where the laser beam is sufficient to ignite a plasma in the relatively heated gas environment

Methodology Applied
Scientific EffectLaser ignition: Laser

Data Source

PatentUS8259771B1Initiating laser-sustained plasma
Publication Date: 2012.09.04 KLA CORP

AI summary

A laser-sustained plasma light source with a bulb for enclosing a relatively cool gas environment, and an electrode disposed at least partially within the gas environment. A power supply applies a potential to the electrode, where the power supply is sufficient to create a corona discharge at the electrode within the gas environment, and the power supply is not sufficient to produce an arc discharge within the gas environment. The corona discharge thereby produces a relatively heated gas environment. A pump laser source focuses a laser beam within the gas environment, where the laser beam is sufficient to ignite a plasma in the relatively heated gas environment, but is not sufficient to ignite a plasma in the relatively cool gas environment.