Laser Polarization Control for Uniform Semiconductor Annealing
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Solution Overview
Problem
Existing laser irradiation systems struggle to effectively control the polarization state of laser light for optimal semiconductor manufacturing processes.
Innovation Solution
A laser irradiation apparatus and method that utilizes a configuration of half-wave plates, polarization beam splitters, and wave plates to control the polarization state of pulsed laser light, allowing for the combination of delayed and non-delayed light paths to achieve a desired polarization state for efficient laser annealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a simple linear polarization laser beam is used, then the device structure is simple, but the polarization state control is insufficient for optimal semiconductor manufacturing
Solution Approach 1:
The optical system is segmented into multiple functional modules: a polarization beam splitter divides the laser beam into orthogonal polarization components, separate wave plates (first and second wave plates) independently control polarization states of different beams, and a combiner recombines them. This modular segmentation allows precise polarization control while maintaining manageable system complexity through functional decomposition.
Solution Approach 2:
Multiple laser beams with different polarization states are merged into a single combined beam that irradiates the semiconductor substrate. The first beam (processed through the first wave plate) and second beam (processed through the second wave plate) are combined after being split by the polarization beam splitter, enabling simultaneous delivery of multiple polarization states to achieve optimal annealing results.
2Manufacturing precision
If multiple optical components are added to control polarization state, then the polarization control precision is improved, but the system complexity increases
Solution Approach 1:
The polarization beam splitter serves multiple functions: it divides the incident laser beam into orthogonal polarization components, acts as a reference for polarization state control, and enables independent manipulation of different polarization components through separate wave plates. This multi-functionality reduces the need for additional specialized components, achieving precise polarization control without proportionally increasing system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the application of laser light with an appropriate polarization state for semiconductor manufacturing, improving the quality and uniformity of crystallized films, thereby enhancing the performance of semiconductor devices.
Implementation Method 1
a first half-wave plate rotatably provided in an optical path of the pulsed laser light
Implementation Method 2
a first polarization beam splitter configured to branch the pulsed laser light from the first half-wave plate into a first pulsed light and a second pulsed light
Implementation Method 3
a first wave plate rotatably provided in an optical path of a combined pulsed light generated by combining the first pulsed light with the second pulsed light
Data Source
AI summary
A laser irradiation apparatus including: a laser light source configured to emit a linearly polarized pulsed laser light; a first half-wave plate rotatably provided in an optical path of the pulsed laser light; a first polarization beam splitter configured to branch the pulsed laser light from the first half-wave plate into a first pulsed light and a second pulsed light; a second polarization beam splitter configured to combined the first pulsed light with the second pulsed light, the second pulsed light, the second pulsed light being delayed from the first pulsed light by using an optical path length difference between the first pulsed light and the second pulsed light; and a first wave plate rotatably provided in an optical path of a combined pulsed light generated by combining the first pulsed light with the second pulsed light at the second polarization beam splitter.