Laser Illumination Positioning Device Heat Management
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current devices for measuring structures on masks or substrates face challenges in achieving high resolution due to the limitations of traditional light sources, particularly at shorter wavelengths, and struggle with heat generation from illumination apparatuses affecting measurement accuracy and device longevity.
Innovation Solution
A device utilizing a laser interferometer system with an excimer laser or frequency-multiplied solid-state laser for illumination, combined with optical elements like high-resolution microscope objectives and protective gas encapsulation to enhance measurement precision and extend optical component lifespan, while separating the illumination apparatus from the movable measuring table to manage heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional light sources are used for illumination, then device complexity is reduced, but measurement precision deteriorates due to inability to achieve high resolution at shorter wavelengths
Solution Approach 1:
The patent replaces traditional mechanical/optical illumination systems with a laser-based illumination system. Specifically, it uses a laser interferometer system with excimer laser or frequency-multiplied solid-state laser to provide illumination, which enables high-resolution measurement at shorter wavelengths while maintaining system functionality.
Solution Approach 2:
The patent changes the illumination wavelength parameter by using advanced laser sources (excimer laser or frequency-multiplied solid-state laser) that operate at shorter wavelengths. This parameter change enables higher measurement precision while the system manages the associated complexity through integrated control.
2Measurement precision
If high-power illumination apparatus is used to improve measurement capability, then measurement precision is improved, but heat generation increases affecting measurement accuracy and device longevity
Solution Approach 1:
The patent extracts the heat-generating illumination apparatus from the movable measuring table assembly. The illumination apparatus is positioned separately from the block that defines the measurement plane, preventing heat from affecting the precision measurement components while maintaining illumination functionality.
Solution Approach 2:
The patent introduces protective gas as an intermediary between the illumination apparatus and the optical components. The protective gas environment shields optical elements from heat and potential contamination, extending their service life while allowing high-power illumination to maintain measurement precision.
3Device complexity
If illumination apparatus is integrated with movable measuring table, then device complexity is reduced, but measurement precision deteriorates due to heat interference
Solution Approach 1:
The patent segments the measurement system into distinct functional modules: the illumination apparatus is separated from the movable measuring table and block assembly. This segmentation allows the illumination system to operate independently without thermal interference, while the measurement plane remains stable and precise.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of smaller structures with improved resolution and extended optical component service life by using advanced light sources and protective gas environments, reducing heat interference and maintaining measurement accuracy.
Implementation Method 1
at least one laser interferometer for determining a positional displacement of the measuring table in the plane is further provided
Implementation Method 2
At least one optical arrangement is provided for transmitted light illumination and/or reflected light illumination
Implementation Method 3
At least one optical arrangement is provided for transmitted light illumination and/or reflected light illumination
Data Source
AI summary
A device for determining the position of a structure on an object in relation to a coordinate system is disclosed. The object is placed on a measuring table which is movable in one plane, wherein a block defines the plane. At least one optical arrangement is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement comprises an illumination apparatus for reflected light illumination and/or transmitted light illumination and at least one first or second optical element, wherein at least part of the at least one optical element extends into the space between the block and an optical system support. At least one encapsulation is provided, encapsulating at least one optical component of at least one optical arrangement and/or at least one optical element.