Laser Processing of Rough Transparent Surfaces With Index-Matched Fluid Film

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Solution Overview

Problem

Current methods for cutting and separating glass substrates are inefficient, costly, and lack repeatability, necessitating a more effective and reliable process for processing transparent workpieces with rough surfaces.

Innovation Solution

A method involving the application of a fluid film with a refractive index similar to the transparent workpiece, combined with a pulsed laser beam that generates induced absorption to create defects and contours on the workpiece, minimizing optical alterations caused by the rough surface and allowing for precise separation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a laser beam is directed through air onto a rough transparent surface, then the rough surface causes optical alterations (scattering, reflection) that reduce processing precision, but applying a fluid film adds process complexity and requires additional materials

Engineering Contradiction:
Improvelaser processing precisionVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

A fluid film (water, oil, or index-matching liquid) is applied to the rough transparent surface to serve as an intermediary medium between the laser beam and the workpiece. This fluid film reduces optical scattering and reflection caused by surface roughness, thereby improving laser processing precision while maintaining a relatively simple process implementation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The refractive index of the fluid film is selected to match or closely approximate the refractive index of the transparent workpiece material. By changing the optical parameters (refractive index) of the medium between the laser and the workpiece, the optical alterations caused by surface roughness are minimized, enabling precise laser processing

Inventive Principle:
Principle #35Parameter changes

2Productivity

If conventional cutting methods are used for glass substrates, then the process is simple and requires minimal additional materials, but the cutting speed is slow and the process lacks repeatability

Engineering Contradiction:
Improvecutting speedVSAvoidprocess repeatability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

Conventional mechanical cutting methods are replaced with laser-based processing. The laser beam, guided by computer control, substitutes for mechanical cutting tools, enabling faster cutting speeds and improved process repeatability through precise digital control of the beam position and parameters

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If the fluid film refractive index closely matches the workpiece refractive index, then optical interference is minimized and processing precision is improved, but the selection of suitable fluids is limited and material compatibility issues arise

Engineering Contradiction:
Improveoptical processing precisionVSAvoidfluid selection flexibility
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The refractive index parameter of the fluid film is optimized to match the specific transparent material being processed (glass, sapphire, fused silica, etc.). Different fluids with different refractive indices are selected based on the workpiece material to minimize optical interference and maximize processing precision for each specific application

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables faster, cleaner, and more reliable separation of transparent workpieces by reducing optical interference and enhancing the precision of laser processing on rough surfaces, improving the efficiency and quality of the cutting process.

Implementation Method 1

applying a fluid film having a first refractive index to a impingement surface of the transparent workpiece that has a second refractive index... a difference between the first refractive index and the second refractive index is about 0.8 or less

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

a portion of the laser beam directed into the transparent workpiece generates an induced absorption within the transparent workpiece, the induced absorption producing the defect within the transparent workpiece

Methodology Applied
Scientific EffectInduced absorption: Absorption (EM radiation)

Implementation Method 3

directing a pulsed laser beam oriented along a beam pathway and output by a beam source, through an aspheric optical element, through the fluid film, through the impingement surface, and into the transparent workpiece

Methodology Applied
Scientific EffectLaser heating: Laser

Data Source

PatentUS12054415B2Methods for laser processing rough transparent workpieces using pulsed laser beam focal lines and a fluid film
Publication Date: 2024.08.06 4JET MICROTECH GMBH & CO KG
  • US12054415B2 patent drawing
  • US12054415B2 patent drawing
  • US12054415B2 patent drawing

AI summary

A method for processing a transparent workpiece includes applying a fluid film having a first refractive index to a impingement surface of the transparent workpiece that has a second refractive index. Further, a difference between the first refractive index and the second refractive index is about 0.8 or less and the impingement surface comprises a surface roughness Ra of about 0.1 μm or greater. The method also includes forming a defect in the transparent workpiece by directing a laser beam oriented along a beam pathway and output by a beam source, through the fluid film, through the impingement surface, and into the transparent workpiece such that a portion of the laser beam directed into the transparent workpiece generates an induced absorption within the transparent workpiece, the induced absorption producing the defect within the transparent workpiece.