Laser Processing With In-Situ Measurement for Thermal-Free Precision

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Solution Overview

Problem

Existing processing technologies for objects, such as those described in US2002/0017509A1, DE 10 2016 124742 A1, and EP 1 935 553 B1, lack improvements in convenience and performance, particularly in the precision and efficiency of processing methods using laser light.

Innovation Solution

A processing system and method that utilizes a laser light source, optical systems, and a stage apparatus to perform precise removal and non-thermal processing of workpieces, including surface cutting, grinding, and polishing, with integrated measurement and observation capabilities to enhance control and accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If laser light is used for processing workpieces, then processing speed and efficiency are improved, but thermal effects cause distortion and reduce manufacturing precision

Engineering Contradiction:
Improveprocessing speedVSAvoidprocessing precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent transforms continuous laser light into ultra-short pulse light with duration of 1 picosecond or less, fundamentally changing the temporal parameter of the light source. This parameter change enables the laser to interact with material on an ultrafast timescale before thermal diffusion can occur, achieving ablation without thermal damage zone

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs periodic pulsed laser irradiation where the laser is switched on and off in ultra-short cycles. Each pulse delivers energy for ablation, then the interval between pulses allows the material to cool without significant heat diffusion, creating a periodic cycle of ablation and cooling that prevents cumulative thermal damage

Inventive Principle:
Principle #19Periodic action

2Loss of substance

If conventional laser processing is used, then material removal is achieved, but thermal diffusion causes recast layers and reduces surface quality

Engineering Contradiction:
Improvematerial removalVSAvoidsurface quality
Core Design Contradiction:
Loss of substanceVSManufacturing precision

Solution Approach 1:

The patent utilizes phase transition from solid to plasma state through ultrafast laser ablation. The ultra-short pulse duration causes the material to transition directly from solid phase to plasma phase without passing through liquid phase, preventing the formation of recast layers and ensuring clean ejection of ablated material

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The patent replaces conventional thermal-based material removal mechanisms with a mechanical-like ejection process. The ultrafast laser pulse creates a shockwave that mechanically ejects material from the surface, substituting the thermal melting and vaporization process with a more controlled ablation mechanism that leaves no recast layer

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If traditional processing methods are used, then equipment complexity is low, but measurement and control accuracy are insufficient

Engineering Contradiction:
Improvesystem complexityVSAvoidmeasurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent merges the laser processing system with an integrated measurement and observation system into a single unified apparatus. The measurement system including microscope, camera, and position detection devices is combined with the laser delivery system, allowing simultaneous processing and real-time measurement without requiring separate equipment

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements real-time feedback control where the measurement system continuously monitors the workpiece surface during laser processing, and the control system adjusts laser parameters based on this feedback. The position detection device tracks the focal point position and provides feedback to maintain optimal focusing conditions throughout the processing operation

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves improved precision and efficiency in processing workpieces by minimizing thermal effects and utilizing advanced optical and mechanical controls, resulting in enhanced processing capabilities.

Implementation Method 1

a laser light source configured to emit light with a duration of 1 picosecond or less

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

an optical system configured to transmit the light emitted by the laser light source toward the workpiece

Methodology Applied
Scientific EffectOptical transmission and focusing: Focusing

Implementation Method 3

When the workpiece is irradiated with pulsed light, a part of the workpiece is removed. The removal processing may be performed by using thermal processing or non-thermal processing

Methodology Applied
Scientific EffectPhotoablation: Laser Ablation

Data Source

PatentEP3875206B1Processing system and processing method
Publication Date: 2025.12.03 NIKON CORP
  • EP3875206B1 patent drawingFigure 1
  • EP3875206B1 patent drawingFigure 2A~2C
  • EP3875206B1 patent drawingFigure 3A~3C

AI summary

A processing system has: a housing that houses an object; a processing apparatus that is disposed in the housing and that processes the object; a measurement apparatus that is disposed in the housing and that measures the object processed by the processing apparatus; and a control apparatus that sets a processing condition by using a measured result of the obj ect.