Laser Apparatus Pulse Energy Control via Segmented Gain
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Solution Overview
Problem
Current laser apparatuses face challenges in accurately controlling pulse energy due to variations in charging voltage and pulse energy, leading to reduced calculation accuracy and increased processing time, especially when dealing with multiple target pulse energies and pulse repetition frequencies.
Innovation Solution
The implementation of a laser control unit that periodically varies the target pulse energy at modulation frequencies corresponding to multiple reference energies and pulse repetition frequencies, calculating multiple control gains to improve energy control accuracy and reduce processing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single control gain is used for pulse energy control, then the device complexity is reduced, but the manufacturing precision and reliability of pulse energy control deteriorate due to variations in charging voltage and pulse energy
Solution Approach 1:
The control gain is segmented into multiple values (first control gain and second control gain) corresponding to different target pulse energy ranges. The system divides the control space into segments, each with its own optimized control parameter, thereby improving control precision without requiring complete system redesign
Solution Approach 2:
The control gain parameter is changed based on the target pulse energy value. When the target pulse energy exceeds a threshold, the system switches from the first control gain to the second control gain, adapting the control parameter to match the operating conditions and maintain high precision across different energy levels
2Manufacturing precision
If multiple control gains are calculated for different target pulse energies, then the manufacturing precision of pulse energy control is improved, but the device complexity increases
Solution Approach 1:
The control system dynamically selects the appropriate control gain based on the target pulse energy value. This dynamic adaptation allows the system to maintain high precision across different operating conditions without requiring a completely complex multi-mode control architecture
Solution Approach 2:
The system changes the control gain parameter according to the target pulse energy range, using a first control gain for lower energy targets and a second control gain for higher energy targets. This parameter adaptation improves precision while keeping the overall system structure manageable
3Productivity
If conventional pulse energy control methods are used, then the processing time is reduced, but the manufacturing precision deteriorates due to reduced calculation accuracy
Solution Approach 1:
The control method is segmented into different calculation approaches based on the target pulse energy range. By dividing the control space into segments with different calculation strategies, the system achieves high precision without requiring computationally intensive processing for all operating conditions
Solution Approach 2:
The control parameter (control gain) is changed based on the target pulse energy, allowing the system to use optimized calculation methods for different energy ranges. This maintains high calculation accuracy while avoiding unnecessary computational overhead
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy of pulse energy control by calculating multiple control gains based on varying target pulse energies and pulse repetition frequencies, thereby improving the precision and efficiency of energy control in laser apparatuses.
Implementation Method 1
a laser chamber including a pair of electrodes and configured to emit, at each of a plurality of pulse repetition frequencies, a pulse laser beam having a pulse energy corresponding to a voltage applied between the electrodes
Implementation Method 2
an energy detector provided on an optical path of the pulse laser beam and configured to detect the pulse energy of the pulse laser beam
Data Source
AI summary
A laser apparatus according to the present disclosure includes: a laser chamber including a pair of electrodes and configured to emit, at each of a plurality of pulse repetition frequencies, a pulse laser beam having a pulse energy corresponding to a voltage applied between the electrodes; an energy detector provided on an optical path of the pulse laser beam and configured to detect the pulse energy of the pulse laser beam; a voltage control unit configured to control the applied voltage based on a target pulse energy and the pulse energy detected by the energy detector; and a pulse energy control unit configured to periodically vary the target pulse energy at a modulation frequency corresponding to each of the pulse repetition frequencies with a reference energy being a center of variation.