Laser Purging Attachment for Chamber Surface Processing
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Solution Overview
Problem
Conventional gas purging systems are ineffective for laser processing of surfaces within chambers, as they cannot be positioned close enough to the surface and obstruct the laser radiation, leading to incomplete removal of contaminants and particles.
Innovation Solution
A purging attachment with central and annular purge gas supply and suction channels that communicate with the chamber through a central opening, allowing for effective gas flow without shading the laser beam, and featuring elongated outlet and inlet openings to prevent particle accumulation and ensure clear laser access.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional gas nozzles or suction devices are used for purging during laser processing, then particles can be removed, but the nozzles cannot be positioned close enough to the surface and shade the laser radiation
Solution Approach 1:
The purging attachment is nested within the laser optics housing, with purge gas supply and suction channels integrated into the existing optical path structure. The central opening in the purging attachment allows the laser beam to pass through while the attachment itself is positioned within the housing that contains the laser optics, enabling close proximity purging without blocking the beam
Solution Approach 2:
The invention transitions from using separate external nozzles positioned at a distance to an integrated attachment structure where purge gas is supplied and suction is applied through channels within the housing structure itself, changing the spatial arrangement from external to internal positioning
2Reliability
If voluminous gas nozzles are used for purging, then particles can be removed, but they shade the laser radiation used for processing
Solution Approach 1:
The purging attachment uses a central opening that is clear of obstructions to allow laser radiation to pass through, while purge gas supply and suction channels are positioned in the annular region around the central opening. This local differentiation ensures that the laser beam path remains unobstructed while purging functionality is maintained in the surrounding area
Solution Approach 2:
The attachment is segmented into distinct functional zones: a central opening for laser beam transmission and annular channels for gas supply and suction. This segmentation separates the laser processing function from the purging function, allowing both to operate effectively without mutual interference
3Manufacturing precision
If sandblasting is used for roughening the membrane rear side, then satisfactory roughening results are achieved, but thorough cleaning is required to remove particles remaining in the housing
Solution Approach 1:
The purging attachment is positioned to supply purge gas and apply suction during or immediately after the sandblasting process, removing particles before they can settle in the housing. This preliminary action eliminates the need for subsequent manual cleaning operations
Solution Approach 2:
The purging system operates continuously during the laser processing and sandblasting operations, maintaining a constant flow of purge gas and suction that prevents particle accumulation throughout the entire manufacturing process, eliminating the need for separate cleaning steps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable removal of contaminants and particles during laser processing of surfaces within chambers, improving the manufacturing process by allowing for automated and efficient gas purging without obstructing the laser radiation.
Implementation Method 1
supplying gas to the chamber through the outlet opening of the at least one purge gas supply channel and suctioning gas through the inlet opening of the at least one purge gas suction channel
Implementation Method 2
a pulsed laser beam focused on the workpiece surface is used, which, locally, strongly heats the material of the workpiece and converts it into the molten phase
Implementation Method 3
This results in the roughening of the irradiated surface
Data Source
AI summary
A purging attachment for a workpiece having a surface to be processed using laser radiation, wherein the workpiece has a chamber open on at least one side of the workpiece, and wherein the surface is within the chamber, comprises: a central opening through the purging attachment; a purge gas supply channel extending through the purging attachment to an outlet opening; a purge gas suction channel extending through the purging attachment to an inlet opening, wherein the outlet opening of the purge gas supply channel and the inlet opening of the purge gas suction channel are arranged on opposite sides of the central opening; and a centering portion configured to interact with a centering region arranged on the side of the workpiece such that the central opening, the outlet opening, and the inlet opening communicate with the chamber.