Laser Processing Apparatus Reflection Mechanism for Optical Waveguide Inclined Surfaces

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Solution Overview

Problem

The existing methods for manufacturing optical waveguide devices with inclined surfaces for optical path conversion are costly and inefficient due to the need for specialized laser processing equipment and prolonged processing times for forming multiple inclined surfaces.

Innovation Solution

A method involving a laser processing apparatus with a reflection mechanism comprising mirror components and a mask with openings, allowing simultaneous formation of optical path conversion inclined surfaces in multiple optical paths without requiring a special laser processing apparatus or oblique laser axis alignment, thereby reducing equipment costs and improving production efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a laser processing apparatus with oblique laser axis or oblique optical waveguide arrangement is used to form inclined surfaces for optical path conversion, then the optical path conversion function is achieved, but the equipment cost increases due to special specification requirements

Engineering Contradiction:
Improveoptical path conversion functionVSAvoidlaser processing apparatus specification
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention divides the laser processing function into two separate components: a vertical laser emitting unit and a reflection mechanism with inclined reflective surfaces. This segmentation allows the laser to be emitted vertically while the reflection mechanism creates the necessary oblique angle for inclined surface formation, eliminating the need for complex oblique laser processing apparatus

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reflection mechanism acts as an intermediary between the vertical laser beam and the optical waveguide. By introducing this intermediate component with inclined reflective surfaces, the system achieves oblique laser processing functionality without requiring the laser emitting unit itself to be oblique or specially configured

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If one recess portion with inclined surface is sequentially formed by one laser irradiation, then the optical path conversion is achieved, but the processing time is considerably prolonged when forming inclined surfaces in multiple core layers

Engineering Contradiction:
Improveoptical path conversionVSAvoidprocessing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention merges multiple laser processing operations into a single simultaneous operation. The mask with multiple openings allows one laser beam to irradiate multiple core layers at the same time, forming multiple inclined surfaces in parallel. This combining of operations dramatically reduces processing time compared to sequential processing of each core layer individually

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The reflection mechanism with multiple inclined reflective surfaces and the mask with multiple openings create a multi-functional processing system. A single laser emitting unit performs the function of multiple laser sources, simultaneously processing multiple optical paths through the reflection mechanism and mask configuration

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the cost-effective and efficient manufacture of optical waveguide devices with inclined surfaces, reducing equipment investment and shortening production time while maintaining high yield and quality.

Implementation Method 1

a reflection mechanism arranged between the stage and the laser emitting unit and comprising mirror components having inclined reflective surfaces

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

irradiating laser to the mirror components and forming optical path conversion inclined surfaces in the plurality of optical paths at the same time by the laser reflected on the mirror components

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS10022927B2Method of manufacturing optical waveguide device and laser processing apparatus
Publication Date: 2018.07.17 SHINKO ELECTRIC IND CO LTD
  • US10022927B2 patent drawing
  • US10022927B2 patent drawing
  • US10022927B2 patent drawing

AI summary

An optical waveguide having a plurality of optical paths is formed on a substrate. A reflection mechanism is arranged above the optical waveguide. The reflection mechanism includes mirror components, each of which has an inclined reflective surface, and a mask having a plurality of openings. Laser is irradiated to the mirror components and optical path conversion inclined surfaces are formed in the plurality of optical paths at the same time by the laser reflected on the mirror components.