Laser Repair Scanning for Selective Multilayer Defect Correction
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Solution Overview
Problem
Conventional laser repair devices fail to account for variations in underlayer materials and film thickness, leading to uneven removal or excessive correction of defect portions in multilayer structured objects, thereby compromising the integrity of the layer structure.
Innovation Solution
A laser repair device that includes a scanning part, camera part, and control part to acquire images and control laser beam output based on color information, allowing precise targeting of defect portions and minimizing exposure to surrounding layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a rectangular work range including the defect portion is designated and the entire work range region is worked with a given repair recipe, then the defect portion can be corrected, but the exposed layer around the defect portion is also worked undesirably
Solution Approach 1:
The patent applies local quality by making the laser beam output variable across different spatial locations within the work range. The control part sets the laser beam output to be ON or High only at scanning positions where color information matches the defect portion, while setting it to OFF or Low at positions corresponding to exposed layers. This spatially differentiated laser application ensures that only the defect portion receives corrective treatment, while surrounding exposed layers are protected from undesired work.
2Ease of manufacture
If work is performed on the inside of the work range with a given repair recipe regardless of underlayer material variations, then the process is simple, but unevenness is caused between the portion to be removed and the portion not to be removed
Solution Approach 1:
The patent implements dynamics by making the laser beam output adjustable and variable during the scanning process. Instead of applying a fixed repair recipe throughout the work range, the control part dynamically changes the laser beam output based on real-time color information recognition. The output is set to ON or High when the scanned position corresponds to the defect portion and OFF or Low when it corresponds to the underlayer or exposed layers. This dynamic adjustment ensures uniform and proper correction across regions with varying underlayer materials while maintaining process automation.
3Manufacturing precision
If all defect portions are removed with work under excessive conditions, then complete removal is achieved, but the underlayer of the defect portion is excessively removed and proper layer structure cannot be maintained
Solution Approach 1:
The patent applies local quality by spatially differentiating the laser beam application based on color information recognition. The control part analyzes the color characteristics of different regions and selectively applies laser energy only where needed. By setting the laser beam output to ON or High only at scanning positions where color information matches the defect portion, and OFF or Low at positions corresponding to underlayer or exposed layers, the system achieves complete defect removal while precisely protecting the layer structure from excessive removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable correction of defect portions without affecting the underlayer, maintaining the multilayer film structure integrity by selectively irradiating only the defect areas.
Implementation Method 1
a camera part for acquiring an image of a region including the defect portion
Implementation Method 2
irradiating a defect portion of a multilayer film structure formed on a substrate with a laser beam
Implementation Method 3
irradiating a defect portion of a multilayer film structure formed on a substrate with a laser beam, and performing a correcting process
Data Source
AI summary
The present invention enables a layer to be worked to be properly subjected to a correcting process without being affected by the variations in the material of the underlayer or in the film thickness of the layer. A laser repair method for irradiating a defect portion of a multilayer film structure formed on a substrate, and performing a correcting process is provided. The method includes: acquiring an image of a region including the defect portion; and setting a scan range of the laser beam on the image so as to include the defect portion. At the time of scan of the inside of the scan range with the laser beam, at a scanning position at which color information of the image is recognized as that of the defect portion, an output of the laser beam is controlled to be ON or High.