Laser Chamber Restart Conditioning With Adaptive Idle Thresholds
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Solution Overview
Problem
Existing photolithography systems face inefficiencies due to cold start events in deep ultraviolet (DUV) light sources, particularly in newly installed or replaced laser chambers, leading to reduced beam energy and increased unavailability, which affects manufacturing yield and dependability.
Innovation Solution
An adaptive control method is implemented to determine the need for cold start conditioning based on multiple triggers, including chamber age, idle period duration, and beam energy, dynamically adjusting the idle duration trigger thresholds to minimize unnecessary cold start procedures while ensuring reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cold start conditioning is performed after every idle period, then beam energy reliability is improved, but system availability and productivity deteriorate due to unnecessary conditioning events
Solution Approach 1:
The patent changes the parameter of idle duration threshold from a fixed value to a dynamic value that varies based on chamber age (shot count). For newer chambers, a longer idle duration threshold is applied, while for older chambers, a shorter threshold is used. This parameter adaptation resolves the contradiction by reducing unnecessary cold start events in mature chambers while maintaining reliability in newer chambers.
Solution Approach 2:
The system dynamically adjusts the idle duration trigger threshold based on real-time chamber age measurements. The control system continuously monitors shot count and modifies the threshold accordingly, transforming a static conditioning strategy into a dynamic one that adapts to chamber lifecycle, thereby balancing reliability and productivity.
2Stability of the object's composition
If cold start conditioning is performed frequently, then beam energy stability is improved, but manufacturing efficiency and downtime reduction worsen
Solution Approach 1:
The patent implements parameter changes by adjusting the idle duration threshold based on chamber age. This dynamic parameter adjustment reduces the frequency of cold start conditioning events in older chambers, thereby improving manufacturing efficiency while maintaining adequate beam energy stability through targeted conditioning only when necessary.
Solution Approach 2:
The system applies partial action by performing cold start conditioning only when the idle duration exceeds the dynamic threshold, rather than after every idle period. This selective application of conditioning reduces unnecessary interruptions and improves manufacturing efficiency while maintaining sufficient beam energy stability through targeted interventions.
3Device complexity
If a fixed idle duration threshold is used for cold start conditioning, then system complexity is reduced, but adaptability to different chamber conditions deteriorates
Solution Approach 1:
The patent introduces dynamics into the control system by making the idle duration threshold a variable parameter that automatically adjusts based on chamber age. This dynamic adaptation significantly improves versatility and adaptability to different chamber conditions, with the added complexity being justified by the substantial improvement in system performance and reliability.
Solution Approach 2:
The control system performs self-service by automatically monitoring chamber age and adjusting the idle duration threshold without requiring external intervention. This self-adjusting mechanism improves adaptability to different chamber conditions while keeping the user interface simple, effectively balancing complexity and versatility.
Data Source
AI summary
A method of and apparatus for conditioning of a laser with one or more chambers after an idle period, is provided. The method of and apparatus invoke conditioning procedures when restarting a laser with one or more chambers after an idle period. One or more of various parameters such as the chamber age and the duration of the idle period preceding restarting the laser may be used to determine whether or what type of conditioning should be performed.