Laser Processing Sapphire Substrates for Precision Separation

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Solution Overview

Problem

The challenge in cutting and separating sapphire substrates lies in the difficulty of achieving precise, efficient, and cost-effective methods due to their hardness and crystalline structure, which leads to prolonged processing times, high costs, and low yields, especially when trying to cut complex shapes.

Innovation Solution

A laser process using ultra-short pulse lasers to create fault lines in sapphire substrates, allowing for controlled crack propagation and separation, potentially followed by a CO2 laser for full separation, reducing the need for mechanical stress and minimizing subsurface damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If diamond-tipped blade is used for mechanical scribing and separation, then cutting capability is achieved, but processing time is prolonged and productivity is reduced

Engineering Contradiction:
Improveprocessing speedVSAvoidprocessing time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent replaces the mechanical scribing system (diamond-tipped blade) with a laser-based system that uses optical energy to induce subsurface cracks and thermal stress for separation. This substitution eliminates mechanical contact, reduces processing time, and increases productivity while maintaining cutting capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The laser processing method utilizes phase transitions through rapid heating and cooling cycles that induce thermal stress and subsurface cracking. The laser heats the sapphire substrate quickly, causing localized phase changes and thermal expansion that propagate cracks along the desired separation path, enabling faster processing than mechanical methods.

Inventive Principle:
Principle #36Phase transitions

2Manufacturing precision

If diamond-tipped blade is used for cutting, then separation is achieved, but edge quality deteriorates due to catastrophic cracking

Engineering Contradiction:
Improveedge qualityVSAvoidcatastrophic cracking
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The laser method performs preliminary action by creating controlled subsurface cracks and fault lines before actual separation occurs. These pre-formed cracks guide the separation process along the desired path, preventing uncontrolled catastrophic cracking and ensuring high edge quality on the separated parts.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The laser-induced subsurface cracks act as intermediaries that mediate the separation process. Instead of direct mechanical force causing uncontrolled cracking, the laser creates intermediate fault lines that guide and control the separation path, resulting in cleaner edges and reduced damage.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If mechanical scribing is used to separate arbitrary shapes, then cutting capability is achieved, but manufacturing cost increases due to blade replacement

Engineering Contradiction:
Improvemanufacturing costVSAvoidblade wear
Core Design Contradiction:
Ease of manufactureVSLoss of substance

Solution Approach 1:

The patent replaces the mechanical diamond blade system with a laser-based optical system. This eliminates blade wear and the need for frequent blade replacement, reducing manufacturing costs and increasing operational efficiency while maintaining the ability to cut arbitrary shapes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The laser system allows dynamic adjustment of processing parameters (power, speed, pulse duration) to optimize cutting for different shapes and materials. This flexibility eliminates the need for physical blade changes and enables cost-effective manufacturing of varied geometries.

Inventive Principle:
Principle #35Parameter changes

4Productivity

If mechanical scribing is used for cutting, then separation is achieved, but yield is reduced due to substrate damage

Engineering Contradiction:
ImproveyieldVSAvoidsubstrate damage
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

Replacing mechanical scribing with laser processing eliminates contact-induced damage to the substrate. The laser method confines damage to controlled subsurface regions along the cut path, preserving the overall integrity of the substrate and increasing the yield of usable parts.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The laser method applies energy locally along the intended cut path, creating subsurface cracks only where needed. This localized action minimizes overall substrate damage and preserves the quality of surrounding areas, thereby increasing the number of usable parts that can be obtained from each substrate.

Inventive Principle:
Principle #3Local quality

5Manufacturing precision

If laser separation is used to create fault lines, then cutting precision is improved, but process complexity increases

Engineering Contradiction:
Improvecutting precisionVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The laser processing is divided into distinct functional stages: fault line creation, crack propagation initiation, and separation completion. This segmentation allows each stage to be optimized independently and simplifies process control while maintaining high cutting precision through systematic progression.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables faster, cleaner, and more reliable cutting and separation of arbitrary sapphire shapes with reduced laser power and subsurface defects, improving edge quality and process efficiency.

Implementation Method 1

the laser beam focal line generating an induced absorption within the material, the induced absorption producing a hole or defect line along the laser beam focal line within the material

Methodology Applied
Scientific EffectInduced absorption: Absorption (EM radiation)

Implementation Method 2

directing a IR laser beam over the plurality of holes or defect lines... propagation of an initial crack by thermal stress separation

Methodology Applied
Scientific EffectThermal stress: Thermal Expansion

Implementation Method 3

creation of defects within the bulk of the material to weaken or seed it with cracking initiation points along the perimeter of the desired shape profile followed by a secondary breaking step

Methodology Applied
Scientific EffectThermal cracking: Thermal Shock

Data Source

PatentUS10179748B2Laser processing of sapphire substrate and related applications
Publication Date: 2019.01.15 4JET MICROTECH GMBH & CO KG
  • US10179748B2 patent drawing
  • US10179748B2 patent drawing
  • US10179748B2 patent drawing

AI summary

A method of laser processing a material to form a separated part. The method includes focusing a pulsed laser beam into a laser beam focal line, viewed along the beam propagation direction, directed into the material, the laser beam focal line generating an induced absorption within the material, the induced absorption producing a hole or fault line along the laser beam focal line within the material, and directing a defocused carbon dioxide (CO2) laser from a distal edge of the material over the plurality of holes to a proximal edge of the material.