Laser Annealing Scan Alignment for Uniform Irradiation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing laser annealing devices experience uneven irradiation due to misalignment of laser beam positions during the annealing process, leading to low evenness or uniformity of the annealing process over the irradiation region.

Innovation Solution

A laser annealing device equipped with a laser scanning unit and an irradiation position alignment unit that adjusts the irradiation positions to align them along both a first direction and a second direction intersecting with each other, ensuring uniform scanning and reduced uneven irradiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If two-dimensional scanning is performed by combining first scanning along a first direction and second scanning along a second direction, then the entire irradiation region can be covered, but uneven irradiation occurs due to misalignment of irradiation positions

Engineering Contradiction:

Improveirradiation region coverageVSAvoidirradiation position alignment

Core Design Contradiction:

Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent performs preliminary alignment of irradiation positions by adjusting the start position of scanning in one direction based on the scanning range in the other direction. This preliminary action ensures that irradiation positions are aligned along both first and second directions before the actual annealing process begins, preventing uneven irradiation while maintaining complete coverage of the irradiation region

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the scanning parameters (start position and scanning range) dynamically based on the relationship between scanning in the first direction and scanning in the second direction. By adjusting these parameters, the system achieves precise alignment of irradiation positions along both directions, resolving the contradiction between comprehensive coverage and positioning precision

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The alignment of irradiation positions along both directions effectively reduces uneven irradiation in the annealing process, enhancing the uniformity and evenness of the annealing process over the entire irradiation region.

Implementation Method 1

irradiates an irradiation region on a workpiece with a laser beam for an annealing process

Methodology Applied

Scientific EffectLaser heating: Laser

Data Source

PatentUS20250125166A1Laser annealing device, laser annealing method, and storage medium

Publication Date: 2025.04.17 SUMITOMO HEAVY IND LTD

AI summary

A laser annealing device irradiates an irradiation region on a workpiece with a laser beam for an annealing process and includes a laser scanning unit that sequentially irradiates different irradiation positions in the irradiation region with the laser beam by scanning the laser beam, and an irradiation position alignment unit that adjusts the irradiation position in scanning performed by the laser scanning unit such that the different irradiation positions in the irradiation region are aligned along each of a first direction and a second direction intersecting with each other.