Laser Scattering Particle Detection in Semiconductor Water
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Solution Overview
Problem
Current methods for monitoring particle contamination in purified water used in semiconductor manufacturing are inefficient, requiring off-site testing and being ineffective at detecting low concentrations of contaminants, leading to increased costs and delayed decision-making.
Innovation Solution
A system that uses a laser beam to detect particles in real-time within the manufacturing facility, employing an imaging device with a lens and detector to accumulate scattered light from particles passing through a vessel, allowing for on-site monitoring of water quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If off-site testing methods (LPC, mass spectrometry) are used to measure particle contamination in purified water, then measurement precision can be achieved, but loss of time and productivity decrease due to periodic sampling and off-site analysis
Solution Approach 1:
The patent replaces mechanical sampling and off-site laboratory analysis with an optical detection system that uses laser light scattering to measure particle contamination in-situ. The laser beam interacts with particles in the purified water, and the scattered light is detected and analyzed to determine particle concentration and size, eliminating the need for physical sampling and transport to laboratories.
Solution Approach 2:
The patent introduces laser light as an intermediary medium to transfer information about particle contamination from the purified water to the detector. The laser beam serves as a carrier that interacts with particles and conveys their presence and characteristics to the detection system, enabling real-time measurement without direct contact or sampling.
2Productivity
If conventional spectrometers are used for in-line monitoring, then some particle detection capability is provided, but measurement precision is insufficient for low concentration contaminants
Solution Approach 1:
The patent changes the detection parameter from conventional spectrometry to laser light scattering intensity measurement. By measuring the intensity of scattered light at specific angles and analyzing its temporal profile as particles pass through the laser beam, the system achieves enhanced sensitivity for detecting low concentration particles that conventional spectrometers cannot reliably identify.
3Reliability
If periodic off-site testing is performed to ensure water quality, then measurement precision is maintained, but device complexity and operational overhead increase
Solution Approach 1:
The patent implements a self-service monitoring system where the purified water itself serves as the medium for detection. The laser beam passes directly through the water stream, and particles in the water scatter the light, providing automatic, continuous measurement without requiring external sampling infrastructure, laboratory equipment, or manual intervention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time monitoring of water quality, reducing the need for periodic off-site testing and allowing for timely maintenance and filtration, effectively detecting particles as small as 20 nm in diameter.
Implementation Method 1
The accumulated light is scattered from the particle
Data Source
AI summary
Examples disclosed herein generally relate to an apparatus and method for detecting particles in a fluid. A system for imaging a particle includes an imaging device. The imaging device has a lens and a detector. A laser source is configured to emit a laser beam. The detector is configured to accumulate an intensity of an accumulated light that passes through the lens. The accumulated light is scattered by the particle. The particle passes through the laser beam over a given period.