Laser Scribing via Multi-Spot Beam Splitting
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Solution Overview
Problem
Existing methods for forming deep scribed grooves in workpieces, such as ceramics, require high laser power or prolonged irradiation, leading to reduced productivity and increased costs, while also complicating the apparatus configuration.
Innovation Solution
A method and apparatus that split a single laser beam into multiple beam spots, allowing for deeper scribed grooves to be formed with less energy and improved scribing speed without complicating the apparatus, using a birefringent element like a wedged quartz crystal plate to split the laser beam into orthogonal components, which are then focused onto the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the laser output power is increased to achieve deeper scribed grooves faster, then the scribing speed improves, but the cost increases due to expensive high-power lasers
Solution Approach 1:
The patent divides a single laser beam into multiple separate beam spots (typically 2-9 spots) that are arranged along the scribing direction. By using multiple lower-power beams instead of one high-power beam, the system achieves the same or better scribing depth and speed while using a less expensive, lower-power laser source. The segmented beams work simultaneously on different portions of the groove, providing cumulative effect without requiring high individual beam power.
2Manufacturing precision
If the irradiation time is prolonged to achieve deeper scribed grooves with limited laser power, then the groove depth increases, but the productivity deteriorates
Solution Approach 1:
Multiple beam spots process different sections of the groove simultaneously, effectively parallelizing the scribing operation. This maintains high power density at each spot for deep penetration while the collective action of multiple spots achieves the full groove depth faster than a single spot could, thus improving both depth and speed.
Solution Approach 2:
The patent uses pulsed laser operation where beams are irradiated in a periodic manner with optimized pulse timing. The pulsed delivery allows each beam spot to accumulate sufficient energy for deep scribing while the periodic rhythm and multiple-spot arrangement ensure continuous progress along the groove, preventing idle time and maintaining high productivity.
3Use of energy by moving object
If multiple pulsed laser beams are used to improve scribing efficiency, then the energy distribution improves, but the apparatus configuration becomes complicated
Solution Approach 1:
The patent introduces a beam splitting element (such as a diffractive optical element, grating, or prism) as an intermediary component that takes a single input beam and automatically divides it into multiple output beams with appropriate spatial distribution. This intermediary device handles the complex task of beam multiplication and positioning, simplifying the overall system architecture compared to using multiple independent laser sources or complex multi-beam control systems.
Solution Approach 2:
The beam splitting element serves multiple functions simultaneously: it divides the single beam into multiple spots, positions them along the scribing direction, and maintains their coherence and synchronization. This multi-functional component eliminates the need for separate systems for beam generation, splitting, and positioning, thereby reducing apparatus complexity while achieving superior energy distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of deeper scribed grooves with efficient energy utilization, allowing for greater scribing speeds and reduced apparatus complexity, as the beam spots can be easily controlled and positioned without pre-formed holes, effectively addressing the limitations of traditional laser scribing methods.
Implementation Method 1
the laser beam of a single ray bundle is split by, for example, a birefringent element into the laser beams of the plurality of ray bundles. The birefringent element may be, for example, a wedged quartz crystal plate, or a multiple-image prism such as a Wollaston prism. When the birefringent element is thus used, the laser beam of a single ray bundle is split by, for example, the quartz crystal plate into an ordinary ray component and an extraordinary ray component the polarization directions of which are orthogonal to one another.
Implementation Method 2
a light focusing means for light focusing each of the laser beams of the plurality of ray bundles
Implementation Method 3
a laser beam source for emitting a laser beam of a single ray bundle
Data Source
AI summary
To form a deeper scribed groove with less energy or to improve the scribing speed, without making the apparatus configuration complicated is intended. The present invention relates to a laser scribing method which includes: forming on a workpiece a plurality of beam spots arranged in a state being separated from one another along the scribing direction, and forming a linear scribed groove on the workpiece by moving the plurality of beam spots in the scribing direction. The plurality of beam spots are obtained from a laser beam of a single ray bundle.