Laser System Segmentation for High Average Power
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Solution Overview
Problem
Current high power gas discharge laser systems face challenges in achieving high average power and reduced ASE and coherence issues, particularly in DUV light sources for photolithography and material treatment applications, where existing solutions struggle with energy density, chamber robustness, and cost-effectiveness.
Innovation Solution
A seed laser and amplification gain medium system with a ring power amplification stage and a regenerative gain media configuration, utilizing a solid state seed laser and gas discharge amplifiers, which operates at higher pulse repetition rates and lower seed laser energy to achieve higher output pulse energy and reduced coherence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high power gas discharge laser systems are used to increase output power, then average power is improved, but ASE and coherence issues worsen
Solution Approach 1:
The laser system is divided into multiple independent laser modules, each operating at a lower power level. These modules are combined to achieve high total output power while maintaining low ASE and coherence issues in each individual module, thus resolving the contradiction between high average power and reduced harmful factors.
Solution Approach 2:
The patent transitions from single-mode operation to multi-mode operation by combining multiple laser modules with different spatial modes. This dimensional change in operational characteristics allows the system to achieve high power output while the diverse mode structure naturally reduces coherence and ASE effects.
2Device complexity
If single chamber laser systems are used to simplify structure, then device complexity is reduced, but energy density and optical damage problems worsen
Solution Approach 1:
The single chamber system is segmented into multiple independent laser modules with separate discharge chambers. This segmentation distributes the energy density across multiple lower-power modules, reducing optical damage risks while the modular design keeps overall system complexity manageable through standardized components.
Solution Approach 2:
Optical combining elements serve as intermediaries that merge the output from multiple low-energy-density laser modules into a single high-power beam. This intermediary approach allows the system to achieve high power without concentrating excessive energy density in any single chamber, thus preventing optical damage.
3Power
If pulse energy is increased to improve output power, then power is improved, but optical damage and chamber robustness requirements worsen
Solution Approach 1:
The total output power is achieved by combining multiple laser modules operating at moderate pulse energy levels rather than using a single module at high pulse energy. This segmentation reduces the robustness requirements for individual chambers while maintaining high overall power output.
Solution Approach 2:
Multiple laser modules operating at moderate power levels are merged through optical combining to achieve high total output power. This combining approach allows the system to reach high power levels without requiring any single chamber to withstand extreme energy densities, thus reducing chamber robustness requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the generation of high average power laser systems with reduced ASE and coherence, improving the efficiency and cost-effectiveness of DUV light sources for photolithography and material treatment applications.
Implementation Method 1
a first pulsed gas discharge amplifier gain medium and a second pulsed gas discharge amplifier gain medium, each having a nominal center wavelength in the UV range
Implementation Method 2
pulsed gas discharge amplifier gain medium
Data Source
AI summary
An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the second seed laser.