Laser Apparatus Self-Oscillation Beam Extraction

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Solution Overview

Problem

In laser apparatuses used for extreme ultraviolet (EUV) light generation, self-oscillation beams waste amplification gain, lower output power, and damage optical components, hindering efficient EUV light production for microfabrication processes requiring feature sizes of 32 nm or less.

Innovation Solution

Incorporating an optical reflector to redirect and an optical absorber to absorb self-oscillation beams, preventing them from re-entering the amplification path and reducing damage to optical components, thereby maintaining high amplification efficiency and stabilizing output power.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If self-oscillation beams are generated in optical amplifiers, then amplification gain is wasted and output power is lowered, but adding optical reflectors and absorbers increases device complexity

Engineering Contradiction:

Improveamplification efficiencyVSAvoidoptical component configuration

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The harmful self-oscillation beams are extracted from the amplification path using optical reflectors that redirect them away from the optical amplifier, preventing them from wasting amplification gain and lowering output power

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Optical absorbers are introduced as intermediary components to absorb the redirected self-oscillation beams, preventing them from re-entering the amplification path and causing damage to optical components

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If self-oscillation beams are not controlled, then optical components may be damaged, but controlling them requires additional optical components that increase system complexity

Engineering Contradiction:

Improveoptical component durabilityVSAvoidoptical component configuration

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Optical reflectors are positioned to redirect self-oscillation beams before they can cause damage to optical components, and optical absorbers are placed to absorb these redirected beams, preventing potential damage in advance

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

The combination of optical reflectors and absorbers acts as an intermediary system that intercepts and neutralizes harmful self-oscillation beams, protecting optical components from damage while maintaining system reliability

Inventive Principle:

Principle #24Intermediary (Mediator)

3Stability of the object's composition

If self-oscillation beams are reflected back into the amplification path, then output power fluctuates, but preventing this requires additional optical control components

Engineering Contradiction:

Improveoutput power stabilityVSAvoidoptical component configuration

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

Optical reflectors extract self-oscillation beams from the amplification path and redirect them to optical absorbers, preventing them from causing output power fluctuations by re-entering the amplification path

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Optical absorbers serve as intermediary components that absorb the redirected self-oscillation beams, ensuring they are completely removed from the system and cannot cause output power instability

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the amplification rate, reduces output fluctuations, and minimizes damage to optical components, ensuring stable and efficient EUV light generation for advanced microfabrication processes.

Implementation Method 1

an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 2

an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector

Methodology Applied

Scientific EffectAbsorption: Absorption (EM radiation)

Implementation Method 3

a transmissive optical element disposed between the master oscillator and the optical amplifier and capable of transmitting the pulse laser beam

Methodology Applied

Scientific EffectTransmission:

Implementation Method 4

a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator, the plurality of optical amplifiers being configured to sequentially amplify the pulse laser beam

Methodology Applied

Scientific EffectStimulated emission:

Data Source

PatentUS9762024B2Laser apparatus and extreme ultraviolet light generation system

Publication Date: 2017.09.12 GIGAPHOTON INC

AI summary

An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.