Laser Irradiation Device Spatial Light Modulator Monitoring
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Solution Overview
Problem
Laser light irradiation devices face issues with confirming the normal operation of spatial light modulators due to defects or abnormalities, which affects the emission of laser light.
Innovation Solution
Incorporating a marking pattern in the laser light that does not enter the pupil plane of the objective lens, allowing for intensity distribution acquisition and confirmation of the spatial light modulator's operation without affecting the laser light irradiation, using a controller to display the phase pattern and an intensity distribution acquisition unit to recognize the modulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a spatial light modulator is used to modulate laser light, then the laser light irradiation can be controlled, but the normal operation of the spatial light modulator cannot be confirmed during emission
Solution Approach 1:
A beam splitter is introduced as an intermediary component to separate a portion of the laser light before it reaches the spatial light modulator. This separated beam serves as a monitoring signal that carries information about the modulator's operation status without interfering with the main irradiation beam, enabling indirect observation of the modulator's performance.
Solution Approach 2:
The system implements feedback by detecting the intensity distribution of the separated laser light beam and comparing it against expected patterns. When the spatial light modulator operates abnormally, the intensity distribution changes, providing feedback signals that trigger alerts or automatic corrections to ensure reliable operation.
2Measurement precision
If the intensity distribution of laser light is monitored, then the spatial light modulator operation can be confirmed, but the laser light irradiation process is affected
Solution Approach 1:
The laser light beam is segmented into two separate paths using a beam splitter: one path continues to the spatial light modulator for the intended irradiation application, while the other path is directed to the intensity distribution detector for monitoring purposes. This segmentation allows simultaneous measurement and operation without mutual interference.
Solution Approach 2:
The beam splitter acts as an intermediary that divides the laser light into monitoring and processing beams, enabling the intensity distribution to be measured without removing or significantly altering the main irradiation beam, thus maintaining productivity while achieving precise measurement.
3Reliability
If the spatial light modulator is monitored during operation, then defects can be detected early, but additional monitoring components increase device complexity
Solution Approach 1:
The intensity distribution detector serves multiple functions: it monitors the spatial light modulator operation, detects defects, and provides feedback for system control. By making this component multi-functional, the patent avoids adding separate dedicated monitoring systems, thereby limiting the increase in device complexity while enhancing reliability.
Solution Approach 2:
The system uses its own laser light beam as the monitoring signal source, eliminating the need for external or separate monitoring light sources. The laser light itself serves the dual purpose of both processing material and providing the signal for detecting modulator operation status, reducing the number of additional components required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate confirmation of the spatial light modulator's normal operation during laser light emission, ensuring reliable laser light irradiation without affecting the process.
Implementation Method 1
a spatial light modulator including a display unit configured to display a phase pattern, the spatial light modulator allowing the laser light generated by the laser light source to enter the display unit and modulating the laser light in accordance with the phase pattern
Implementation Method 2
an objective lens configured to converge the laser light emitted from the spatial light modulator at the object
Data Source
AI summary
A laser light irradiation device includes a laser light source, a spatial light modulator, a controller, an objective lens, and an intensity distribution acquisition unit. The laser light source generates laser light. The spatial light modulator includes a display unit configured to display a phase pattern, allows the laser light to enter the display unit, and modulates the laser light in accordance with the phase pattern to emit the laser light. The controller controls the phase pattern to be displayed. The objective lens converges the laser light emitted from the spatial light modulator at the object. The intensity distribution acquisition unit acquires an intensity distribution of the laser light emitted from the spatial light modulator and entering the objective lens. The controller displays, on the display unit, the phase pattern including a marking configured to modulate part, in the laser light, not entering a pupil plane of the objective lens.