Laser Light Source Mode Control for Melting and Illumination
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Solution Overview
Problem
Existing light source technologies face inefficiencies in operation and maintenance, particularly in switching between modes for generating illumination light and changing solid target materials to a molten state, with challenges in debris management and power density control.
Innovation Solution
A control apparatus and light source apparatus that includes a control unit to switch between modes, adjusting power density and focus of laser light to manage debris and efficiently transition between generating illumination light and melting solid target materials, using a crucible or cylindrical drum to hold the target material and optical elements to direct and focus the light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the light source apparatus switches between modes for generating illumination light and changing solid target materials to molten state, then the functionality and versatility of the apparatus is improved, but the complexity of operation and maintenance increases
Solution Approach 1:
The control apparatus changes operational parameters (laser power density, focus position, irradiation duration) to switch between modes. In the first mode, high power density is used to generate illumination light from molten target material, while in the second mode, controlled power density changes melt solid target material. This parameter-based mode switching enables versatile functionality without requiring separate physical systems, thereby improving adaptability while managing operational complexity through standardized control procedures.
2Productivity
If high power density laser light is used to generate illumination light from molten target material, then the illumination intensity and productivity are improved, but debris generation and harmful factors increase
Solution Approach 1:
The control apparatus converts the harmful debris generated during high-power laser irradiation into beneficial effects. By controlling the laser irradiation parameters and using the generated debris as part of the target material composition, the system maintains high productivity while managing harmful factors. The debris is managed through controlled irradiation zones and optical systems that direct the harmful factors away from sensitive areas, transforming a negative outcome into a manageable aspect of the high-efficiency illumination generation process.
3Manufacturing precision
If the laser light focus is adjusted for different modes, then the precision of target material processing is improved, but the complexity of control and measurement increases
Solution Approach 1:
The control apparatus performs preliminary actions by pre-setting focus positions and laser parameters for each mode before operation begins. The system stores predetermined focus positions and power density values for both the first mode (illumination light generation) and the second mode (solid to molten transformation). This preliminary configuration simplifies real-time control and measurement by eliminating the need for complex dynamic adjustments during operation, thereby improving processing precision while reducing control complexity through standardized pre-configured parameters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves operational efficiency and maintenance by effectively managing debris and optimizing power density for different modes, enhancing the performance and reliability of optical apparatuses like inspection and exposure systems.
Implementation Method 1
irradiates laser light onto at least one of a holding unit of the target material or the target material in a solid state to change the target material from the solid state to a molten state
Implementation Method 2
irradiates laser light onto a molten target material to generate illumination light
Data Source
AI summary
A control apparatus for an optical apparatus including a light source apparatus according to the present disclosure is configured to determine a mode to be executed from among a plurality of modes and control the optical apparatus accordingly. The plurality of modes include a first mode in which the light source apparatus irradiates laser light onto a molten target material to generate illumination light, and the optical apparatus illuminates an object using the illumination light, and a second mode in which the light source apparatus irradiates laser light onto at least one of a holding unit of the target material or the target material in a solid state to change the target material from the solid state to a molten state.