Laser Machining Stage Error Compensation With Grid Plate Imaging
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Laser machining apparatuses face errors due to lens aberration and stage movement inaccuracies, leading to manufacturing defects in substrates like display substrates.
Innovation Solution
An apparatus and method that include a stage with a grid plate, a motor driver, and an imaging unit to generate error compensation tables by synchronizing position signals with the stage's movement, using a high-speed camera and reflective material for precise imaging and aberration correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the stage moves continuously to improve productivity, then manufacturing efficiency increases, but movement errors and positioning inaccuracies occur
Solution Approach 1:
The imaging unit continuously captures substrate images during stage movement, providing real-time feedback on actual position. The controller compares this with commanded position and dynamically adjusts laser parameters and stage velocity to compensate for movement errors, enabling continuous operation while maintaining precision.
Solution Approach 2:
The patent performs preliminary imaging and error compensation table generation before actual machining. The controller pre-calculates compensation values based on measured stage movement errors, which are then applied during machining to correct positioning inaccuracies without interrupting the production flow.
2Speed
If the imaging speed is increased to capture moving stage positions, then real-time error compensation is possible, but the complexity and cost of the imaging system increases
Solution Approach 1:
The patent uses a standard imaging unit (camera) to capture images of the substrate and grid plate. By creating digital copies of the physical positions and using image processing algorithms to extract position information, the system achieves high-speed measurement without requiring complex specialized sensors or hardware.
Solution Approach 2:
The patent introduces a grid plate as an intermediary object that simplifies position measurement. The grid plate provides known reference patterns that are easy to detect and measure, acting as a mediator between the stage position and the imaging unit, thereby reducing the complexity of direct position sensing.
3Manufacturing precision
If error compensation tables are generated through detailed imaging and analysis, then manufacturing precision improves, but the time required for calibration and setup increases
Solution Approach 1:
The patent performs error compensation table generation as a preliminary step before actual production. The imaging unit captures substrate images and the controller calculates error compensation values in advance. Once generated, these compensation tables are stored and automatically applied during machining, requiring no additional time during production runs.
Solution Approach 2:
The patent enables continuous error compensation during machining by pre-generating comprehensive compensation tables that cover the entire working range. The controller continuously applies these pre-calculated corrections without interrupting the machining process, maintaining precision throughout production without repeated calibration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively compensates for aberration and movement errors, improving the accuracy and efficiency of laser machining processes, thereby enhancing the precision and productivity of substrate manufacturing.
Implementation Method 1
the grid plate comprises a reflective material and a light from a lighting unit is provided to the grid by coaxial illumination
Data Source
AI summary
An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.