Laser Stage Suction Structure for Splinter Removal Control

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Solution Overview

Problem

Laser processing apparatuses face challenges in effectively removing contamination materials and splinters produced during cutting or etching processes, leading to processing errors due to inadequate air flow management.

Innovation Solution

The apparatus incorporates a suction structure with an inclined suction hole and an air supply nozzle system, where the suction hole is positioned close to the target object, and the air supply nozzle is adjustable, creating a guided air flow to efficiently remove contaminants and splinters by inhaled external air.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a suction structure with an inclined suction hole is positioned close to the target object, then contamination materials and splinters are effectively removed, but the device complexity increases

Engineering Contradiction:
Improveprocessing reliabilityVSAvoidair flow management structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The suction structure is divided into multiple functional components: an inclined suction hole for contaminant removal, a supply nozzle for air injection, and an inflow groove for air intake. This segmentation allows each component to perform its specific function efficiently, resolving the contradiction by making the complex structure manageable and effective.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

External air acts as an intermediary substance that carries contamination materials and splinters from the processing area to the suction hole. The supply nozzle introduces this intermediary air flow that facilitates the removal process, reducing the direct complexity of the suction mechanism itself.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the suction hole is positioned close to the target object, then contamination removal efficiency is improved, but the risk of processing errors increases due to inadequate air flow management

Engineering Contradiction:
Improvecontamination removal efficiencyVSAvoidprocessing accuracy
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

Air is supplied through the supply nozzle before the laser processing operation begins or simultaneously during processing. This preliminary air flow preparation ensures that the air flow path is established and ready to immediately carry away contaminants as they are generated, preventing processing errors while maintaining high removal efficiency.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system creates a controlled air flow environment where the interaction between supplied air, external air, and suction flow provides continuous feedback on the contamination removal effectiveness. This feedback mechanism allows the system to maintain processing accuracy by adjusting to the actual contamination generation rate.

Inventive Principle:
Principle #23Feedback

3Reliability

If an adjustable supply nozzle is used to create guided air flow, then contaminant removal is improved, but the device complexity increases

Engineering Contradiction:
Improvecontamination controlVSAvoidair supply system
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The supply nozzle is designed with adjustability, allowing the air flow direction and intensity to be dynamically changed according to the specific processing requirements. This dynamic capability enables the system to adapt to different contamination patterns and target object geometries, improving contamination control without requiring multiple fixed nozzles.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The air flow parameters (direction, velocity, volume) are made changeable through the adjustable supply nozzle. By modifying these parameters, the system can optimize the air flow for different processing conditions, achieving reliable contamination control while using a single versatile nozzle rather than multiple fixed components.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the reliability of the laser processing apparatus by effectively removing contamination materials and splinters, preventing processing errors and improving overall performance.

Implementation Method 1

a suction unit configured to inhale external air; and a suction structure over the stage and adjacent to the at least one supply nozzle, the suction structure having a suction hole, which is connected to the suction unit and through which the external air is inhaled

Methodology Applied
Scientific EffectSuction: Suction

Implementation Method 2

at least one supply nozzle over the stage to eject air toward the stage

Methodology Applied
Scientific EffectAir ejection: Jet

Data Source

PatentUS11148229B2Laser processing apparatus including a supply nozzle and a suction structure over a stage
Publication Date: 2021.10.19 SAMSUNG DISPLAY CO LTD
  • US11148229B2 patent drawing
  • US11148229B2 patent drawing
  • US11148229B2 patent drawing

AI summary

A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.