Laser Processing Apparatus with Real-Time Strobe Flash Feedback
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Solution Overview
Problem
The existing laser processing apparatuses face issues with inconsistent laser beam output power and inaccurate focused spot positioning due to variations in the laser beam irradiation, leading to insufficient processing.
Innovation Solution
A laser processing apparatus equipped with control means that utilizes strobo flash irradiation and image pickup means to detect the processed state in real-time, correcting any displacement or power variations by controlling the X-axis and Y-axis moving means to ensure precise positioning and power consistency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If laser beam irradiation is performed without real-time monitoring, then processing speed is maintained, but positioning accuracy and power consistency deteriorate
Solution Approach 1:
The patent implements real-time feedback by capturing images of the laser beam spot position and processed state during irradiation, comparing them with target positions, and automatically correcting deviations through the control unit to maintain positioning accuracy without reducing processing speed
Solution Approach 2:
The system performs preliminary positioning detection by capturing images before and during laser irradiation to predict and correct potential deviations in spot position and processed state, ensuring accuracy is maintained throughout the processing sequence
2Reliability
If real-time detection systems are added, then positioning accuracy and power consistency are improved, but device complexity increases
Solution Approach 1:
The imaging system serves multiple functions: detecting laser spot position, monitoring processed state, and providing feedback for correction, allowing one detection system to address multiple sources of variability without proportionally increasing complexity
Solution Approach 2:
The control unit acts as an intermediary that processes images from the detection system, calculates deviations, and generates correction commands, integrating the detection and correction functions through a centralized control mechanism
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time detection and correction of laser beam positioning and power variations, ensuring accurate and efficient processing of semiconductor wafers by maintaining the focused spot at the intended position and optimal power levels.
Implementation Method 1
strobo flash irradiation means for irradiating strobo flash upon a route of the dichroic mirror and the condenser
Implementation Method 2
a beam splitter disposed between the strobo flash irradiation means and the dichroic mirror and configured to split light from the workpiece held on the chuck table
Implementation Method 3
a condenser configured to converge the pulse laser beam oscillated from the pulse laser beam oscillation means and irradiate the pulse laser beam upon the workpiece held on the chuck table
Implementation Method 4
a dichroic mirror disposed between the pulse laser beam oscillation means and the condenser and configured to reflect the pulse laser beam oscillated from the pulse laser beam oscillation means to introduce the pulse laser beam to the condenser while allowing light of wavelengths other than a wavelength of the pulse laser beam to pass therethrough
Implementation Method 5
image pickup means disposed on the route split by the beam splitter... to detect a processed state on the basis of an image signal from the image pickup means
Data Source
AI summary
A laser beam irradiation unit of a laser processing apparatus includes a pulse laser oscillator, a condenser which converges and irradiates a pulse laser beam upon a workpiece held on a chuck table, a dichroic mirror disposed between the pulse laser oscillator and the condenser, a strobo flash irradiation unit which irradiates light on a route of the dichroic mirror and the condenser, a beam splitter disposed between the strobo flash irradiation unit and the dichroic mirror, and an image pickup unit disposed on the route of the light split by the beam splitter. A control unit renders the strobo flash irradiation unit and the image pickup unit operative in a timed relationship with the pulse laser beam oscillated from the pulse laser beam oscillator and irradiated upon the workpiece and detects a processed state on the basis of an image signal from the image pickup unit.