Semiconductor Laser Submount Bonding for Low Thermal Resistance

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Solution Overview

Problem

Existing semiconductor laser packaging structures face challenges in achieving high heat dissipation performance and robustness against temperature cycles, leading to increased thermal resistance and decreased optical output power.

Innovation Solution

The proposed semiconductor light-emitting apparatus includes a substrate, a submount with a spacer region, and a semiconductor laser bonded with AuSn solder. The submount is bonded to the substrate using a thicker second bonding material, which is controlled to maintain a thickness that suppresses crack occurrence and thermal resistance increase.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a packaging structure with AuSn solder and submount is used to connect semiconductor laser to heat dissipation block, then heat dissipation performance is improved, but thermal strain resistance during temperature cycles deteriorates

Engineering Contradiction:
Improveheat dissipation performanceVSAvoidthermal strain resistance
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent changes the physical state of the bonding material from solid (conventional AuSn solder) to liquid (low-melting-point alloy), which fundamentally alters the mechanism of thermal strain resistance while maintaining heat dissipation performance. The liquid state allows continuous adjustment and flow to accommodate thermal expansion differences.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite structure combining the semiconductor laser chip, submount, liquid bonding material, and heat dissipation block. The liquid bonding material acts as a composite interface that simultaneously provides thermal conduction and mechanical compliance to handle thermal strain.

Inventive Principle:
Principle #40Composite materials

2Reliability

If bonding material thickness is increased to suppress crack occurrence, then thermal strain resistance is improved, but thermal resistance increases

Engineering Contradiction:
Improvecrack suppressionVSAvoidthermal resistance
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent changes the bonding material from solid to liquid state, which allows achieving crack suppression through viscosity and flow properties rather than thickness. The liquid bonding material can accommodate thermal strain through its fluid nature without requiring increased thickness, thus avoiding thermal resistance increase.

Inventive Principle:
Principle #35Parameter changes

3Strength

If conventional solid bonding material is used to bond submount to substrate, then bonding strength is achieved, but thermal strain accommodation deteriorates

Engineering Contradiction:
Improvebonding strengthVSAvoidthermal strain accommodation
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent fundamentally changes the bonding material from solid to liquid state, transforming the mechanism of strength provision from rigid mechanical bonding to fluid adhesion and capillary forces. This liquid state enables simultaneous achievement of bonding strength and thermal strain accommodation through its flow and deformation capabilities.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The liquid bonding material serves as an intermediary between the submount and substrate, providing a compliant interface that mediates thermal strain while maintaining bonding. Its liquid nature allows it to act as a shock absorber and stress distributor across the bonding interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the semiconductor light-emitting apparatus' ability to withstand thermal strain from temperature cycles while maintaining low thermal resistance, ensuring stable optical output power even after repeated temperature cycle tests.

Implementation Method 1

optical semiconductor device chip 1010 disclosed in PTL 1 is connected to submount 1020 with AuSn solder 1041 interposed therebetween. Submount 1020 is connected to metal heat dissipation block 1030 with AuSn solder 1042 interposed therebetween.

Methodology Applied
Scientific EffectSoldering: Soldering

Implementation Method 2

to efficiently transfer heat generated in the semiconductor laser to the outside, a packaging structure including the semiconductor laser should have high heat dissipation performance.

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12212115B2Semiconductor light-emitting apparatus and method of fabricating semiconductor light-emitting apparatus
Publication Date: 2025.01.28 NUVOTON TECH CORP JAPAN
  • US12212115B2 patent drawing
  • US12212115B2 patent drawing
  • US12212115B2 patent drawing

AI summary

Semiconductor light-emitting apparatus includes substrate, submount above substrate, and semiconductor laser above submount. Semiconductor laser and submount are bonded to each other with first bonding material. Substrate and submount are bonded to each other with second bonding material. Submount has first region and second region near substrate, first region being a region on which spacer is disposed, and second region being a region without spacer. Submount is bonded to substrate by covering at least a portion of second region with second bonding material.