Laser Beam Direction Control for Substrate Separation
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Solution Overview
Problem
Existing laser-induced channel formation processes for substrate separation face challenges in achieving uniform spacing and efficient separation due to variations in laser beam speed and angle of incidence, which affect the formation and uniformity of laser-induced channels and subsequent substrate separation.
Innovation Solution
A laser system configured with a laser delivery assembly and optical elements that direct a pulsed laser beam at an oblique angle along a process path, forming spaced-apart laser-induced channels with controlled draft angles to facilitate precise substrate separation, allowing for consistent channel spacing and efficient separation of substrate portions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a laser beam is used to form channels in substrate for separation, then precision and smooth surface are improved, but uniform spacing and separation efficiency deteriorate due to variations in beam speed and angle of incidence
Solution Approach 1:
The patent employs dynamic adjustment of the laser beam delivery system, specifically varying the angle of incidence and beam positioning along the process path to maintain consistent channel spacing and formation quality throughout the substrate separation process
Solution Approach 2:
The system dynamically changes laser processing parameters including angle of incidence, beam position, and potentially pulse timing to compensate for variations and maintain uniform channel spacing, thereby improving both precision and separation efficiency
2Manufacturing precision
If conventional cutting techniques are used for substrate separation, then ease of operation is maintained, but manufacturing precision and surface smoothness deteriorate requiring post-processing
Solution Approach 1:
The patent replaces mechanical cutting methods with laser-induced channel formation, eliminating the need for mechanical contact and subsequent grinding or finishing operations, thereby achieving smooth separation surfaces directly through controlled laser processing
3Manufacturing precision
If laser-induced channels are formed with zero or near-zero kerf, then manufacturing precision is improved, but separation difficulty increases due to lack of material removal
Solution Approach 1:
The laser processing creates localized modifications along the process path, forming channels with specific geometric characteristics including draft angles that facilitate separation while maintaining zero-kerf precision, applying different quality characteristics to different regions of the substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control over laser-induced channel formation and substrate separation, ensuring consistent channel spacing and efficient separation with reduced material removal, suitable for zero-kerf processes and the creation of angled features.
Implementation Method 1
A laser system is configured to form laser-induced channels in a substrate at a plurality of spaced apart locations along a process path
Data Source
AI summary
A laser system is configured to form laser-induced channels in a substrate at a plurality of spaced apart locations along a process path. The laser system includes a laser delivery assembly that receives the laser beam along a receiving axis and directs the laser beam toward the substrate along an impingement axis that forms an oblique angle with a surface of the substrate. The substrate can be divided into separate first and second portions along a separation surface having a draft angle, thereby facilitating substrate division with a zero-kerf process.