Laser Processing Head Debris Suction and Cleaning
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Solution Overview
Problem
Existing laser processing apparatuses face issues with debris deposition on optical components and suction lines, leading to reduced suction force and frequent maintenance needs, as the protective film evaporates and debris becomes fixed, hindering effective debris collection.
Innovation Solution
A laser processing apparatus with a suction line and cleaning liquid supply system that includes a nozzle, reservoir, and suction source to collect and clean debris, preventing its fixation on optical components and maintaining suction efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective film is formed on the wafer before laser processing to prevent debris adhesion, then device quality is improved, but the protective film evaporates during laser processing and deposits debris on the suction line and optical components
Solution Approach 1:
The patent converts the harmful evaporated protective film debris into a beneficial collected substance by introducing a suction line that actively draws the debris away from optical components and directs it to a collection container, transforming the harmful deposition problem into a controlled collection process
Solution Approach 2:
The suction line acts as an intermediary between the laser processing zone and the collection container, intercepting the evaporated protective film debris before it can deposit on optical components, and transporting it to a safe collection location
2Object-generated harmful factors
If air is blown along the optical axis of the focusing objective lens to collect debris, then some debris collection is achieved, but the air flow is insufficient and debris still deposits on the focusing objective lens and other optical components
Solution Approach 1:
The patent employs a suction line with active negative pressure generation to create a more effective gas flow system compared to simple air blowing, enabling reliable debris collection and preventing deposition on optical components
3Object-generated harmful factors
If the suction line is used to collect debris continuously, then debris collection is improved, but the debris becomes fixed on the suction line like an ice pillar, reducing suction force and requiring frequent maintenance
Solution Approach 1:
The patent implements a collection container that receives and stores the evaporated protective film debris, allowing the system to discard the harmful debris in a controlled manner and recover the ability to maintain optimal suction performance without frequent maintenance interruptions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively suppresses debris deposition on optical components and suction lines, ensuring continuous operation and reducing maintenance by using a cleaning liquid to clean the suction line, even when debris is stuck, thus maintaining suction force and preventing debris accumulation.
Implementation Method 1
laser beam oscillating means for oscillating a laser beam and a processing head for applying the laser beam oscillated by the laser beam oscillating means to the workpiece
Implementation Method 2
performing ablation to the workpiece held by the holding means
Implementation Method 3
a focusing lens for focusing the laser beam oscillated by the laser beam oscillating means
Implementation Method 4
a suction source for sucking the debris and a suction line having one end connected to the suction source and the other end opening to the front side of the workpiece
Data Source
AI summary
A laser processing apparatus including a processing head for applying a laser beam to a workpiece. The processing head includes a focusing lens and a collecting unit provided between the focusing lens and the workpiece for collecting debris generated by the application of the laser beam focused by the focusing lens to the workpiece. The collecting unit includes a suction source for sucking the debris and a suction line having one end connected to the suction source and the other end opening to the front side of the workpiece. The laser processing apparatus further includes a cleaning liquid supplying unit for supplying a cleaning liquid to the suction line.