Laser Surface Tracing for In-Focus Nanofabrication
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Solution Overview
Problem
Laser nanofabrication accuracy is compromised by workpiece surface roughness, tilt, deformation, and external mechanical impacts, leading to decreased precision and fabrication quality.
Innovation Solution
An automatic surface tracing method and system that adjusts the relative position of the laser focus using image recognition technology to maintain the laser beam in-focus, employing height adjustment algorithms based on light intensity and beam size thresholds, symmetry, and angle analysis to correct focal position errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If laser nanofabrication is performed on workpieces with uneven surfaces or under external mechanical impact, then processing speed and equipment simplicity are maintained, but manufacturing precision deteriorates due to laser focus deviation from the workpiece surface
Solution Approach 1:
The patent implements a feedback control system where the state of the laser beam on the workpiece surface is continuously identified. When the laser beam is detected to be out-of-focus, the system automatically adjusts the relative distance between the microscope objective and the workpiece surface to bring the laser focus back to the surface, thereby maintaining nanofabrication accuracy despite surface unevenness or external disturbances
Solution Approach 2:
The system performs self-adjustment by automatically detecting its own focus state and correcting the laser focal position without external intervention. The automatic surface tracing function enables the system to maintain optimal focusing conditions through self-monitoring and self-correction mechanisms
2Manufacturing precision
If manual focus adjustment is used to maintain laser focus on uneven workpiece surfaces, then manufacturing precision is improved, but ease of operation deteriorates due to complex manual adjustment requirements
Solution Approach 1:
The system automatically detects the focus state of the laser beam and performs self-adjustment by controlling the height adjustment mechanism to maintain optimal focus position. This eliminates the need for manual focus adjustment operations while maintaining high laser focus accuracy
Solution Approach 2:
The patent replaces manual mechanical focus adjustment with an automated control system that uses image recognition and control algorithms to detect focus state and actuate the height adjustment mechanism, thereby eliminating complex manual operations
3Manufacturing precision
If automatic surface tracing with image recognition is implemented, then manufacturing precision is improved by maintaining laser focus, but device complexity increases due to additional sensors and control systems
Solution Approach 1:
The patent integrates the image sensor into the existing microscope objective system, allowing it to serve dual purposes: traditional optical microscopy and laser focus detection. This multi-functionality approach minimizes additional hardware requirements while achieving automatic surface tracing capability
Solution Approach 2:
The system uses the existing optical path and image sensor as an intermediary to detect laser focus state without requiring separate dedicated sensing systems. The image sensor captures laser spot information that is then processed by control algorithms to determine focus accuracy
4Device complexity
If laser focus is not accurately maintained on the workpiece surface, then device complexity remains low, but reliability deteriorates due to decreased processing quality and yield
Solution Approach 1:
The system continuously monitors the laser beam state on the workpiece surface and provides feedback control by adjusting the relative distance between the microscope objective and workpiece surface when focus deviation is detected, thereby maintaining reliable fabrication quality without significantly increasing system complexity
Solution Approach 2:
The automatic surface tracing system performs self-correction of focus deviations caused by surface unevenness or external disturbances, maintaining consistent processing quality through self-monitoring and self-adjustment mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves processing success rate, quality, and accuracy by ensuring the laser beam remains in-focus, regardless of surface flatness or external disturbances, without requiring significant hardware changes to existing laser processing devices.
Implementation Method 1
capturing a position image of the laser beam on the surface of the workpiece
Implementation Method 2
high light intensity in the focal region of a tightly focused laser beam that is usually focused by a microscope objective
Implementation Method 3
The laser focus is used to modify material properties to fabricate structures with nanometer precision
Implementation Method 4
uses high light intensity in the focal region of a tightly focused laser beam to modify material properties
Implementation Method 5
Laser 3D nanoprinting technology...fabricate structures with nanometer precision in different materials (including polymers, glass, metals, new two-dimensional materials, etc.)
Data Source
AI summary
An automatic surface tracing method, system, and storage medium are for laser processing. The method includes, at the initial moment, identifying the state of the laser beam on the surface of the workpiece to be processed. If the state is in an out-of-focus state, the relative distance between the microscope objective and the surface of the workpiece to be processed is adjusted, and the state is simultaneously identified until it is identified as an in-focus state. The method for identifying the state of the laser beam includes capturing a position image of the laser beam on the surface of the workpiece to be processed in real-time, and identifying the state of the laser beam accordingly. The method can effectively improve the processing success rate, processing quality and processing accuracy, and is economical and efficient.