Laser-Sustained Plasma Full Numerical Aperture Pump

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Solution Overview

Problem

Laser-sustained plasma light sources face damage due to back-reflection of pump laser, which reduces efficiency when attempting to mitigate this through reduced reflection optics or apertures.

Innovation Solution

Employing dual laser sources with different characteristics (wavelength or polarization) and corresponding dichroic optics to separate incoming and outgoing beams, ensuring the outgoing beams are directed into a beam dump rather than back to the laser source, allowing full numerical aperture usage without damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If full numerical aperture reflection optics are used to maximize laser power delivery to plasma, then light source efficiency is improved, but back-reflected light damages the laser source

Engineering Contradiction:
Improvelight source efficiencyVSAvoidlaser source damage from back-reflection
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent segments the laser beam into two separate beams with different characteristics (e.g., different wavelengths or polarizations). The first beam sustains the plasma while the second beam serves as a reference. This segmentation allows the system to maintain full numerical aperture optics for maximum efficiency while preventing back-reflection damage by directing each beam type to appropriate destinations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces dichroic optics as an intermediary element that selectively reflects or transmits different beam characteristics. These optics act as mediators between the laser sources and the plasma, allowing the system to maintain full numerical aperture reflection optics for maximum power delivery while directing back-reflected light away from the laser sources through wavelength- or polarization-selective pathways.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If reflection optics solid angle is reduced to prevent back-reflection damage, then laser source protection is improved, but light delivery efficiency to plasma deteriorates

Engineering Contradiction:
Improvelaser source protectionVSAvoidlaser power delivery efficiency
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent segments the optical paths for different laser characteristics, allowing the full solid angle of reflection optics to be utilized for plasma excitation while separate pathways handle the reference beam and back-reflected light. This eliminates the need to reduce the solid angle and maintains maximum energy delivery efficiency.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the parameters of the laser beam (wavelength or polarization) to create distinguishable beam characteristics. This allows the reflection optics to operate at full numerical aperture for maximum power delivery while dichroic elements selectively route different parameter variations to appropriate destinations, preventing back-reflection damage without reducing solid angle.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If aperture is used to block back-reflected light, then laser source protection is improved, but amount of laser light delivered to plasma is reduced

Engineering Contradiction:
Improvelaser source protectionVSAvoidlaser light quantity to plasma
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent uses dichroic optics as intermediaries that selectively interact with different beam characteristics rather than using apertures that physically block light. These intermediary elements route back-reflected light away from the laser source based on wavelength or polarization differences, preserving the full quantity of laser light delivered to the plasma while still protecting the laser source.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration maintains high efficiency of the light source while preventing laser damage from back-reflection, enabling a brighter, smaller plasma without sustaining optical damage.

Implementation Method 1

first optics that are reflective to the first characteristic and transmissive of the second characteristic, for reflecting the first beam portion along a first path into a reflection optics and through a cell to sustain a plasma, second optics that are reflective to the second characteristic and transmissive of the first characteristic

Methodology Applied
Scientific EffectDichroic reflection: Dichroic Filter

Implementation Method 2

the first characteristic is different from the first characteristic, where the first characteristic is a first wavelength and the second characteristic is a second wavelength. Alternately, the first characteristic is a first polarization and the second characteristic is a second polarization

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 3

Laser-sustained plasma light sources function by stimulating a plasma in a gas that is contained within an environment, such as a glass cell. The plasma is sustained by a so-called pump laser that is focused to a small spot within the cell.

Methodology Applied
Scientific EffectLaser-sustained plasma: Plasma

Data Source

PatentUS8517585B1Full numerical aperture pump of laser-sustained plasma
Publication Date: 2013.08.27 KLA CORP
  • US8517585B1 patent drawing
  • US8517585B1 patent drawing
  • US8517585B1 patent drawing

AI summary

A laser-sustained light source having a first laser source for providing a first beam portion having a first characteristic, a second laser source for providing a second beam portion having a second characteristic, where the first characteristic is different from the first characteristic, first optics that are reflective to the first characteristic and transmissive of the second characteristic, for reflecting the first beam portion along a first path into a reflection optics and through a cell to sustain a plasma, second optics that are reflective to the second characteristic and transmissive of the first characteristic, for reflecting the second beam portion along a second path into the reflection optics and through the cell to sustain the plasma, the first path exiting to the second optics, where the first beam is transmitted through the second optics and into a beam dump, and the second path exiting to the first optics, where the second beam is transmitted through the first optics and into the beam dump.