Laser-Textured Chamber Surfaces for High-Emissivity Thermal Control

Solution Overview

Problem

Conventional methods for creating black body or gray body surfaces on chamber components fail to achieve the target emissivity levels, absorption levels, and uniformity in surface pattern, and uniformity in surface pattern, and uniformity in surface pattern, leading to thermal management inefficiencies and device failures in semiconductor manufacturing.

Innovation Solution

Utilizing laser material processing to form a hexagonal lattice structure on chamber components, such as susceptors, to achieve precise and customizable black body surfaces with emissivity levels of up to 0.98, enhancing thermal management and heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional methods are used to create black body surfaces, then the manufacturing process is simple, but the emissivity level and absorption level are insufficient

Engineering Contradiction:

Improveemissivity levelVSAvoidmanufacturing process complexity

Core Design Contradiction:

Loss of energyVSEase of manufacture

Solution Approach 1:

The patent replaces conventional mechanical surface treatment methods with laser-based material processing. The laser system uses optical energy to ablate and texture the chamber component surface, forming a lattice structure that achieves high emissivity (0.98) and absorption levels without requiring complex mechanical tooling or multiple processing steps

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical parameters of the surface by using laser processing to create a specific lattice structure with controlled geometry. By adjusting laser parameters (power, pulse duration, scanning speed) and structure parameters (lattice size, depth, spacing), the surface achieves optimized thermal radiation properties with emissivity up to 0.98 across multiple frequencies and angles

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If conventional methods are used to create black body surfaces, then the manufacturing process is simple, but the uniformity of surface pattern is insufficient

Engineering Contradiction:

Improveuniformity of surface patternVSAvoidmanufacturing process complexity

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent replaces mechanical surface treatment methods with laser-based material processing. The laser system uses optical energy to ablate and texture the chamber component surface, forming a lattice structure that achieves high emissivity (0.98) and absorption levels without requiring complex mechanical tooling or multiple processing steps

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent incorporates feedback mechanisms in the laser processing system to maintain consistent surface pattern uniformity. By monitoring and controlling laser parameters in real-time during processing, the system ensures repeatable lattice structure formation across the entire chamber component surface, achieving uniform thermal radiation properties

Inventive Principle:

Principle #23Feedback

3Temperature

If conventional methods are used to create black body surfaces, then the manufacturing process is simple, but the thermal management efficiency is insufficient

Engineering Contradiction:

Improvethermal management efficiencyVSAvoidmanufacturing process complexity

Core Design Contradiction:

TemperatureVSEase of manufacture

Solution Approach 1:

The patent replaces conventional mechanical surface treatment methods with laser-based material processing. The laser system uses optical energy to ablate and texture the chamber component surface, forming a lattice structure that achieves high emissivity (0.98) and absorption levels without requiring complex mechanical tooling or multiple processing steps

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical parameters of the surface by using laser processing to create a specific lattice structure with controlled geometry. By adjusting laser parameters (power, pulse duration, scanning speed) and structure parameters (lattice size, depth, spacing), the surface achieves optimized thermal radiation properties with emissivity up to 0.98 across multiple frequencies and angles

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The hexagonal lattice structure effectively manages thermal radiation, minimizing defects and improving thermal management and heat dissipation, enhancing thermal management, and extends the lifespan of semiconductor devices by reducing thermal-induced failures and improving device performance.

Implementation Method 1

performing laser material processing on at least one surface of the chamber component of the processing chamber to form a textured surface

Methodology Applied

Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

the textured surface comprises a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence

Methodology Applied

Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Data Source

PatentUS20250385068A1Black body surface generation using laser material processing

Publication Date: 2025.12.18 APPLIED MATERIALS INC

AI summary

A chamber component of a processing chamber, including a body and a textured surface on at least one surface of the body, where the textured surface includes a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.