Laser-Partitioned Thin Film Sensor for Curved Surfaces
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Manufacturing thin film sensors on curved or recessed surfaces is challenging due to the difficulty in accurately aligning and fixing masks, especially on small diameters, and creating precise patterns.
Innovation Solution
A thin film sensor design featuring an insulating layer and a sensor layer with laser-irradiated grooves that partition regions for pressure or temperature sensing, allowing for easy manufacturing on curved surfaces, where grooves are formed using a picosecond or less laser beam to minimize burrs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If lithography with mask alignment is used to manufacture thin film sensors on curved surfaces, then pattern transfer can be achieved, but manufacturing accuracy deteriorates due to difficulty in aligning and fixing masks on curved surfaces
Solution Approach 1:
The patent replaces the mechanical mask alignment system with a direct laser irradiation system. Instead of using physical masks that require precise mechanical alignment on curved surfaces, the invention uses laser beams to directly write patterns onto the resist layer, eliminating the need for mask fixation and alignment mechanisms entirely.
Solution Approach 2:
The patent introduces a laser beam as an intermediary between the pattern design and the resist layer. The laser serves as a mediator that can flexibly adapt to curved surfaces without requiring physical contact or mechanical alignment, thereby solving the mask alignment problem on non-planar surfaces.
2Ease of manufacture
If conventional laser irradiation is used to form grooves, then regions can be partitioned, but burr formation increases affecting sensor quality
Solution Approach 1:
The patent changes the temporal parameter of laser irradiation by using ultrashort pulse durations (picosecond or femtosecond range). This parameter change fundamentally alters the material interaction mechanism, preventing heat diffusion that causes burr formation, while still achieving effective groove partitioning for sensor region definition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the straightforward fabrication of thin film sensors on curved or recessed surfaces with improved accuracy and reduced burr formation, facilitating effective pressure or temperature detection.
Implementation Method 1
a plurality of regions partitioned by a groove that is provided by irradiation of a laser
Implementation Method 2
the groove may be provided by irradiating a surface of the sensor layer with a laser beam of picosecond or less
Data Source
AI summary
A thin film sensor includes an insulating layer provided on a surface of a measurement target, and a sensor layer that is laminated on the insulating layer, and includes a plurality of regions partitioned by a groove that is provided by irradiation of a laser and penetrates in a thickness direction. Among the plurality of regions, at least one region corresponds to a sensor region that senses a pressure applied to the measurement target or a temperature of the measurement target, and other regions each correspond to a non-sensor region that does not sense a pressure applied to the measurement target or a temperature of the measurement target.