Time-Divided Laser Optical Module for Speckle and Intensity Control

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Solution Overview

Problem

Existing optical devices using laser beams face challenges in improving processing accuracy and energy efficiency, including energy loss, intensity control, speckle suppression, and timing and waveform control of laser beams.

Innovation Solution

The optical device incorporates multiple laser light sources, output modules with optical modulators, and a time divider that divides laser beams in time, along with optional subsidiary dividers, to enhance energy efficiency, control output intensity, and suppress speckles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a single laser light source is used, then the device structure is simple, but energy efficiency is poor and processing accuracy is limited

Engineering Contradiction:
Improveenergy lossVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent divides a single laser beam into multiple beams using beam splitters and directs them through separate optical paths with independent modulators. This segmentation allows each beam to be processed independently, improving energy utilization efficiency while maintaining a manageable system structure through modular design.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If multiple laser light sources are used, then energy efficiency and processing accuracy are improved, but device complexity increases

Engineering Contradiction:
Improveprocessing accuracyVSAvoiddevice structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system segments the laser processing function into multiple independent channels, each with its own modulator and optical path. This allows precise control of each beam while maintaining overall system manageability through modular architecture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple laser beams are processed through a shared optical path system and control architecture, allowing the system to handle multiple processing tasks simultaneously while reducing redundant components. The modular design enables universal application across different processing requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Illumination intensity

If laser beams are not divided in time, then the device structure is simple, but output intensity control and speckle suppression are poor

Engineering Contradiction:
Improveoutput intensity controlVSAvoidtime division structure
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent implements time-division multiplexing where laser beams are periodically switched between different optical paths using acousto-optic modulators. This periodic action enables precise control of beam intensity and timing while reducing speckle effects through temporal separation of coherent light paths.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

Acousto-optic modulators serve as intermediary devices that control the timing and intensity of laser beams without requiring direct mechanical intervention. These mediators enable precise temporal control and intensity modulation while maintaining system stability and reducing speckle artifacts.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Loss of time

If acousto-optic devices are used, then timing control and speckle suppression are improved, but energy loss increases

Engineering Contradiction:
Improvebeam output timing controlVSAvoidenergy loss
Core Design Contradiction:
Loss of timeVSLoss of energy

Solution Approach 1:

Acousto-optic modulators are used as intermediary devices to achieve precise timing control of laser beams. While they introduce some energy loss, the modular design allows optimization of their placement and operation to minimize overall energy impact while maximizing timing precision and speckle suppression benefits.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces energy loss, improves energy efficiency, allows for precise control of output intensity and timing, and suppresses speckles, thereby enhancing the overall performance of the optical device.

Implementation Method 1

The time divider divides the laser beam using a plurality of reflecting surfaces

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

an acousto-optic device disposed between the light source and the output module

Methodology Applied
Scientific EffectAcousto-optic effect: Acousto-optic Effect

Data Source

PatentUS20250170671A1Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
Publication Date: 2025.05.29 NIKON CORP
  • US20250170671A1 patent drawing
  • US20250170671A1 patent drawing
  • US20250170671A1 patent drawing

AI summary

An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.