Time-Divided Laser Optical Modulation for Beam Timing and Speckle Control

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Solution Overview

Problem

Current optical devices using laser beams face challenges in improving processing accuracy and energy efficiency, including energy loss, intensity control, speckle suppression, and timing control of beam output.

Innovation Solution

The optical device incorporates multiple laser light sources, output modules with optical modulators, and a time divider using reflecting surfaces to divide laser beams in time, along with an acousto-optic device for precise control, enabling synchronized or asynchronous operation of spatial light modulators and multiple output paths for enhanced energy management and waveform control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a single laser light source is used, then the device structure is simple, but energy loss increases and processing accuracy decreases

Engineering Contradiction:
Improveenergy lossVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent divides a single laser beam into multiple beams using a beam splitter, creating multiple optical paths that can be independently controlled. This segmentation allows the system to process multiple regions simultaneously, reducing overall energy loss while maintaining a relatively simple device structure by using one laser source instead of multiple sources.

Inventive Principle:
Principle #1Segmentation

2Productivity

If multiple laser light sources are used, then energy efficiency improves, but device complexity increases

Engineering Contradiction:
ImprovethroughputVSAvoiddevice structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent combines multiple optical paths into a single laser source by using a beam splitter to divide the beam and then using optical switches to route different beam portions to different output modules. This merging approach achieves the productivity benefits of multiple sources while reducing device complexity by using one laser source instead of multiple independent sources.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces dynamic control through optical switches that can rapidly route laser beams between different output modules based on processing requirements. This dynamic switching capability allows the system to adapt to different throughput demands and processing patterns, improving overall productivity without requiring a fixed complex multi-source configuration.

Inventive Principle:
Principle #15Dynamics

3Speed

If laser beam intensity is increased, then processing speed improves, but thermal effects increase

Engineering Contradiction:
Improveprocessing speedVSAvoidthermal effects
Core Design Contradiction:
SpeedVSTemperature

Solution Approach 1:

The patent divides the laser beam into multiple lower-intensity beams that can be distributed to different output modules. Each beam operates at a lower intensity level, reducing thermal effects, while the combined processing across multiple modules maintains high overall processing speed. This segmentation of both the beam and the processing tasks allows speed improvement without excessive heating.

Inventive Principle:
Principle #1Segmentation

4Manufacturing precision

If beam output timing is not precisely controlled, then device operation is simple, but processing accuracy decreases

Engineering Contradiction:
Improveprocessing accuracyVSAvoidcontrol system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent incorporates control systems that monitor and adjust the timing of laser beam output to different modules. By implementing feedback control on the optical switches and beam routing, the system can precisely synchronize beam delivery with processing requirements, achieving high manufacturing precision while keeping the control system complexity manageable through coordinated control of existing components.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces energy loss, improves energy efficiency, allows for precise control of output intensity and timing, and suppresses speckles, resulting in a high-energy, high-power beam output with reduced thermal effects and improved throughput in applications like flat panel display manufacturing.

Implementation Method 1

a time divider which is disposed between the plurality of laser light sources and the output module and which is configured to divide laser beams emitted from the plurality of laser light sources in time

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

an acousto-optic device disposed between the light source and the output module

Methodology Applied
Scientific EffectAcousto-optic effect: Acousto-optic Effect

Data Source

PatentUS11899372B2Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
Publication Date: 2024.02.13 NIKON CORP
  • US11899372B2 patent drawing
  • US11899372B2 patent drawing
  • US11899372B2 patent drawing

AI summary

An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.