Laser Transfer Pressing Structure for Uniform Micro LED Placement

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Solution Overview

Problem

Conventional laser transfer methods for micro LEDs face issues with the bending of pressing members due to temperature and pressurizing force, leading to non-uniformity in the pressurizing force and potential manufacturing defects.

Innovation Solution

A manufacturing device with a support member that absorbs pressure, a mask member with laser light transmission and blocking capabilities, and a pressing member with gas pressure regulation, ensuring uniform pressurizing force and minimizing thermal expansion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a pressing member is used to pressurize the donor substrate during laser transfer, then the laser transmission and micro LED transfer are enabled, but the pressing member bends due to temperature and pressurizing force, causing non-uniform pressurizing force

Engineering Contradiction:
Improveuniformity of pressurizing forceVSAvoidbending of pressing member
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The pressing member is divided into multiple independent pressing portions, each corresponding to a donor substrate position. This segmentation allows each portion to independently apply pressure without being affected by bending in other areas, ensuring uniform pressurizing force across all donor substrates during laser transfer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A support member is introduced as an intermediary between the pressing member and the donor substrates. The support member has a height equal to the sum of the thickness of each donor substrate and the height of each light emitting element, providing a stable base that prevents direct transmission of bending forces to the pressing member while maintaining uniform pressure distribution.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Use of energy by moving object

If the pressing member is pressurized to transmit laser light effectively, then laser transmission is improved, but thermal expansion occurs due to the temperature and pressurizing force

Engineering Contradiction:
Improvelaser transmission efficiencyVSAvoidthermal expansion of pressing member
Core Design Contradiction:
Use of energy by moving objectVSTemperature

Solution Approach 1:

A gas pressure regulation system is used to control the pressurizing force applied to the pressing member. By regulating the gas pressure, the system maintains optimal contact pressure for laser transmission while avoiding excessive pressure that would cause thermal expansion. The gas pressure can be adjusted to compensate for thermal effects during the laser transfer process.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device provides uniform pressurizing force, reduces thermal expansion, and enhances manufacturing efficiency by preventing defects in the target substrate.

Implementation Method 1

a mask member disposed on a front surface of the support portion and defining a plurality of first openings corresponding to a transmission area of a laser light

Methodology Applied
Scientific EffectLaser light transmission: Light

Implementation Method 2

a mask member disposed on a front surface of the support portion and defining a plurality of first openings corresponding to a transmission area of a laser light

Methodology Applied
Scientific EffectLaser light blocking: Absorption (EM radiation)

Implementation Method 3

The support member has a height equal to a sum of a thickness of each of the donor substrates and a height of each of the light emitting elements. Hence, the support member absorbs pressure otherwise acting onto the donor substrates due to its thickness and the common rest on the display substrate

Methodology Applied
Scientific EffectPressure absorption: Compression

Implementation Method 4

a pressing portion including a pressing member for pressing the support member and the plurality of donor substrates disposed on the display substrate

Methodology Applied
Scientific EffectMechanical pressure: Compression

Implementation Method 5

a laser irradiation portion disposed on an upper portion of the mask member for irradiating the laser light to light emitting elements of the donor substrates

Methodology Applied
Scientific EffectLaser irradiation: Laser

Data Source

PatentEP4683466A1Manufacturing device and manufacturing method for display panel
Publication Date: 2026.01.21 SAMSUNG DISPLAY CO LTD
  • EP4683466A1 patent drawingFigure 1
  • EP4683466A1 patent drawingFigure 2
  • EP4683466A1 patent drawingFigure 3

AI summary

A manufacturing device of a display panel includes: a support portion (200) on which a display substrate (20) is mounted, a mask member (310) disposed on a front surface of the support portion (200) and defining first openings (312-OS) corresponding to a transmission area of a laser light, a support member (380) disposed on the display substrate (20) and defining a plurality of second openings (380-OS) formed in an area corresponding to donor substrates (TSUB) disposed on the display substrate (20), respectively, a pressing portion (300) including a pressing member (350) for pressing the support member (380) and the donor substrates (TSUB) disposed on the display substrate (20), and a laser irradiation portion (500) disposed on an upper portion of the mask member (310) for irradiating the laser light to light emitting elements (LE) of the donor substrates (TSUB). The support member (380) has a height (20-h) equal to a sum of a thickness (T-h) of each of the donor substrates (TSUB) and a height (L-h) of each of the light emitting elements (LE).