Laser System Trigger Correction for Pulse Waveform Stability

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Solution Overview

Problem

The challenge in laser annealing for large-sized liquid crystal displays is stabilizing the pulse waveform of bundled laser beams, which is affected by changes in charging voltages applied to individual laser apparatuses, leading to fluctuations in discharge timings and degradation of annealing quality.

Innovation Solution

A laser system with trigger-correction units that adjust the correction times to synchronize the emission of pulse laser beams, ensuring that the elapsed time between delay signals and discharge detection signals approaches a target value, thereby stabilizing the pulse waveform of the bundled laser beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple laser apparatuses are operated independently with separate charging voltages, then each laser apparatus can be controlled individually, but the pulse waveform stability of bundled laser beams deteriorates due to discharge timing fluctuations

Engineering Contradiction:
ImproveIndividual laser apparatus controlVSAvoidPulse waveform stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent implements feedback control by detecting the actual discharge timing of each laser apparatus and comparing it with the target discharge timing. The trigger-correction units then adjust the trigger timing based on the detected timing deviations, creating a closed-loop control system that maintains pulse waveform stability despite variations in charging voltages or operational conditions.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts the trigger timing for each laser apparatus in real-time based on detected discharge timing variations. The trigger-correction units modify the trigger signals adaptively, allowing the system to respond to changing conditions such as voltage fluctuations or temperature changes, thereby maintaining synchronized discharge timing across all laser apparatuses.

Inventive Principle:
Principle #15Dynamics

2Use of energy by moving object

If the charging voltages are adjusted to optimize laser output, then the laser energy can be optimized, but the discharge timings become unstable leading to pulse waveform degradation

Engineering Contradiction:
ImproveLaser energy optimizationVSAvoidDischarge timing precision
Core Design Contradiction:
Use of energy by moving objectVSManufacturing precision

Solution Approach 1:

The detection units continuously monitor the discharge timing of each laser apparatus, and the trigger-correction units use this feedback information to adjust trigger timing. This allows the system to maintain precise discharge timing even when charging voltages are adjusted for energy optimization, as the feedback loop compensates for any timing deviations caused by voltage changes.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The trigger-correction units pre-adjust the trigger timing based on detected timing deviations before the next discharge cycle. By proactively correcting timing offsets in advance, the system ensures that subsequent discharges occur at the precise target timing, preventing cumulative timing errors and maintaining manufacturing precision.

Inventive Principle:
Principle #10Preliminary action

3Area of stationary object

If the number of laser apparatuses is increased to cover larger irradiation areas, then the processing area is expanded, but synchronizing the discharge timings becomes more difficult

Engineering Contradiction:
ImproveIrradiation areaVSAvoidSynchronization complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The system divides the synchronization control into independent segments, with each laser apparatus having its own detection unit and trigger-correction unit. This modular approach allows each apparatus to be controlled and corrected independently, simplifying the overall synchronization task by breaking it down into manageable individual control loops rather than requiring complex centralized coordination.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each laser apparatus performs self-diagnosis and self-correction through its dedicated detection and trigger-correction units. The detection unit monitors its own discharge timing, and the trigger-correction unit automatically adjusts its trigger signal to correct any timing deviations. This self-service mechanism reduces the complexity of external synchronization control, especially when scaling to multiple apparatuses.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the stability of the pulse waveform, improving the quality of laser annealing and enabling the efficient manufacturing of larger liquid crystal displays by maintaining consistent energy density across the irradiation area.

Implementation Method 1

a first magnetic compression circuit configured to compress the pulse current outputted from the first capacitor

Methodology Applied
Scientific EffectMagnetic compression: Magnetic Field

Implementation Method 2

a first discharge timing detector configured to detect discharge between the first pair of discharge electrodes and output a first discharge detection signal

Methodology Applied
Scientific EffectElectrical discharge detection: Electric Arc

Data Source

PatentUS9991665B2Laser system
Publication Date: 2018.06.05 GIGAPHOTON INC
  • US9991665B2 patent drawing
  • US9991665B2 patent drawing
  • US9991665B2 patent drawing

AI summary

The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.