Integrated Laser Wavelength Sensor for Semiconductor Wafer Processing
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Solution Overview
Problem
Conventional methods for detecting and controlling the specific wavelength of a laser beam in semiconductor fabrication are cumbersome and economically disadvantageous, as they require separate devices like current controlling units and optical detectors, making it difficult to simplify equipment and accurately control the wavelength directly on a wafer.
Innovation Solution
A system with a specific wavelength detecting sensor, comprising a metallic laser beam absorbing structural body within a transparent vacuum tube, which absorbs the laser beam and varies its conductive rate to detect and control the wavelength directly on a wafer, using a current sensor connected to a wavelength controlling unit to adjust the beam's wavelength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a hollow cathode lamp with separate current controlling unit and optical detector is used to detect laser wavelength, then wavelength detection capability is achieved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines the current controlling unit, optical detector, and hollow cathode lamp into a single integrated wavelength detecting sensor. The sensor housing contains all components in one unified structure, eliminating the need for separate devices and reducing overall system complexity while maintaining wavelength detection accuracy.
Solution Approach 2:
The integrated wavelength detecting sensor performs multiple functions within a single device: it controls the current to the hollow cathode lamp, detects the optical signal, and processes the wavelength information. This multi-functional design reduces the number of separate components needed in the laser wavelength control system.
2Measurement precision
If conventional wavelength detection systems are used, then wavelength measurement is possible, but the equipment requires separate devices and is economically disadvantageous
Solution Approach 1:
The patent integrates multiple separate devices (current controlling unit, optical detector, hollow cathode lamp) into a single manufactured unit. This integration simplifies the manufacturing process by reducing the number of separate components that need to be produced, assembled, and calibrated, thereby reducing overall manufacturing cost and complexity.
3Measurement precision
If separate current controlling units and optical detectors are used, then wavelength detection is achieved, but ease of operation and equipment simplification is hindered
Solution Approach 1:
The patent combines all wavelength detection and control functions into a single integrated sensor that requires only simple connection to the laser system. The unified design eliminates the need for operators to manage multiple separate devices and their interconnections, significantly improving ease of operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for accurate and direct detection and control of the laser beam's wavelength on a wafer, simplifying equipment and reducing economic burdens by integrating the detection process within a unitary structure, ensuring stable and precise wavelength control.
Implementation Method 1
a laser beam absorbing structural body for absorbing a specific wavelength of the laser beam emitting toward the stage
Implementation Method 2
for absorbing a specific wavelength of the laser beam emitting toward the stage, wherein the stage may be moved in a straight line and/or rotational path
Data Source
AI summary
A system of controlling a wavelength of a laser beam is provided. The system comprises a stage for supporting a wafer, an optical convergence unit for emitting the laser beam moving in an optical path toward the stage, and a specific wavelength detecting sensor. The specific wavelength detecting sensor is disposed between the optical convergence unit and the stage. It includes a laser beam absorbing structural body for absorbing a specific wavelength of the laser beam emitting toward the stage. A wavelength controlling unit for selectively controlling the wavelength of the laser beam is also provided.